Wafer Robotics
ATM-205
Equipe / PRI / Brooks Atmospheric Top-Mount Single-Arm Wafer-Handling Robot
About this part
ATM-205 identifies an atmospheric top-mount single-arm robot originating with Equipe Technologies and subsequently documented under PRI Automation and Brooks Automation. The manufacturer configuration matrix assigns the ATM-205 base model a 5.25-inch arm link and 10-inch Z stroke. Vacuum count, mapping, flipper, CE, wet-process, end-effector, and customer-specific features require a complete suffixed model code or unit label
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Base model | ATM-205 |
| Product architecture | Atmospheric top-mount single-arm robot |
| Manufacturer lineage | Equipe Technologies; later PRI Automation and Brooks Automation |
| Arm link | 5.25 in (manufacturer configuration-matrix value) |
| Z stroke | 10 in (manufacturer configuration-matrix value) |
| Controlled axes | Theta rotation, radial extension/retraction, and vertical Z movement |
| Repeatability | 3-sigma repeatability of ±25 µm for the Atmospheric Single-Arm Robot family |
| Documented wafer-size envelope | 75–300 mm (3–12 in); the installed end effector and system integration determine configured-unit capability |
| Contamination rating | Cleanroom Class 1 as stated in the 2005 manufacturer manual; no ISO-class equivalence is asserted |
| Recommended vacuum source | 25 in Hg at greater than 1 SCFM free flow; exact vacuum-line and end-effector configuration is suffix-dependent |
| Operating temperature | 15–32.5 °C (59–89 °F) |
| Storage temperature | −20–40 °C (−4–104 °F) |
| Relative humidity | 10–80%, non-condensing |
| Maximum operating altitude | 1,000 m above sea level |
| Controller relationship | The robot operates as part of a robotic system with a Brooks Smart Controller (ESC); it is not a stand-alone machine |
What Does ATM-205 Mean?
The manufacturer configuration matrix defines the base-model geometry. The unsuffixed identifier does not establish optional equipment.
| Segment | Field | Interpretation |
|---|---|---|
| ATM | Mounting and operating environment | Atmospheric Top Mount |
| 205 | Base-model configuration | Configuration-matrix entry with a 5.25-inch arm link and 10-inch Z stroke |
Documented Option Suffixes
These features apply only when the corresponding suffix appears in the complete model code or on physical-label evidence.
| Suffix | Manufacturer-defined option | Applicability to ATM-205 |
|---|---|---|
| -1 | Single vacuum | Not established by the unsuffixed identifier |
| -2 | Dual vacuum | Not established by the unsuffixed identifier |
| -S | Cassette mapper/scanner | Not established by the unsuffixed identifier |
| -F | Flipper | Not established by the unsuffixed identifier |
| -CE | CE-mark option | Not established by the unsuffixed identifier |
| -WET | Wet-process configuration | Not established by the unsuffixed identifier |
Integration and Service Notes
Correct mechanical documentation and controller files must be matched to the configured unit.
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $99.99 to $99.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- [ROBOT] BROOKS PRI REPAIR ATM-205,ABM-205,ATM-405,ABM-405,ATM-407,ATM-305