Wafer Robotics

ATM-1593

Equipe / PRI / Brooks Atmospheric Wafer-Handling Robot Archive Identifier

About this part

ATM-1593 is an archive identifier associated with an Equipe/PRI/Brooks atmospheric wafer-handling robot. Brooks documentation defines ATM as Atmospheric Top Mount and uses an ATM-XXX base-model pattern followed by option suffixes, but ATM-1593 is not listed as a documented model. The unit’s manufacturing label and build records are required to establish its exact base model, arm geometry, Z stroke, vacuum configuration, options, controller requirements, and firmware compatibility

Configurations vary. Verify the exact unit before choosing a replacement.

No archived photo available

Key Facts

ManufacturerBrooks Automation / PRI Automation / Equipe Technologies
Part numberATM-1593
Product familyConfiguration-specific
Device typeWafer Handling Assembly
Configuration statusConfiguration varies
Application classWafer automation
CategoryWafer Robotics

Specifications

Identification
Record identifierATM-1593
Manufacturer model statusATM-1593 is not listed in the Brooks Automation Atmospheric Single-Arm Robot configuration matrix
Family designation
ATM prefixAtmospheric Top Mount
Configuration boundary
Exact base modelNot established; do not infer ATM-104 or ATM-105 from auction-title keywords
Exact configured optionsNot established; arm length, Z stroke, vacuum channels, mapper/scanner, flipper, CE marking, and wet-process construction require unit-specific evidence

What Does ATM-1593 Mean?

Only the ATM prefix can be decoded from the manufacturer’s configuration matrix. The remaining characters do not match a documented base-model and suffix construction.

SegmentFieldInterpretation
ATMMounting familyAtmospheric Top Mount
1593Base-model and option portionNot defined by the manual’s ATM-XXX base-model and option-suffix matrix; do not interpret it as a documented manufacturer model without manufacturing-label or build-record evidence

Atmospheric Single-Arm Family Reference

These are manufacturer-published family characteristics, not exact configured-unit claims for ATM-1593.

Repeatability±25 µm at 3 sigma
Documented wafer-size range75–300 mm (3–12 in)
Contamination classificationCleanroom Class 1
Motion systemThree polar-coordinate axes: theta/rotation, radial/reach, and Z/vertical

Documented ATM Option Suffixes

The family manual defines these suffixes for complete model codes. Their presence on ATM-1593 has not been established.

Suffix patternDocumented option
-1Single vacuum
-2Dual vacuum
-SCassette mapper/scanner
-FFlipper
-CECE Mark configuration
-WETWet-process configuration

Configuration and Service Verification

Documentation Downloads

Local PDF copies

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$3,200.00Based on archived listing records
Recorded price range$3,200.00 - $3,200.00Low to high recorded listing price
Local documents1PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $3,200.00 to $3,200.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Equipe PRI Brooks ATM-1593 Wafer Handling Robot (ATM-104 ATM-105)

Archived listings

Other Part Numbers & Aliases

ATM-1593