Wafer Robotics
6-0000-3066-PC
Brooks Automation Pre-Aligner
About this part
Brooks Automation 6-0000-3066-PC is a configured pre-aligner assembly for semiconductor wafer-handling equipment. The exact PRE-series base model, supported wafer sizes, axis count, loading arrangement, controller requirements, and customer-specific options are not established by the available exact-part evidence and must be confirmed from the unit nameplate or system configuration records
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part number | 6-0000-3066-PC |
| Equipment type | Wafer pre-aligner |
| PRE-series base model | Not established from exact-part evidence |
| Model-specific specifications | Wafer size, axis count, load type, controller, interfaces, and options require nameplate or system-record verification |
Atmospheric Pre-Aligner Family Reference
Brooks manual 125516 distinguishes six legacy atmospheric pre-aligner models. This matrix explains the configuration attributes that must be verified before applying family specifications to 6-0000-3066-PC; it does not establish which model is contained in this configured assembly.
| Model | Axes | Supported wafer sizes | Load type | Robot end effector |
|---|---|---|---|---|
| PRE-050 | 1 | 76–200 mm (3–8 in) | Chuck | Horseshoe |
| PRE-200 | 3 | 76–200 mm (3–8 in) | Chuck | Horseshoe |
| PRE-201 | 3 | 76–200 mm (3–8 in) | Pin | Blade |
| PRE-300 | 3 | 200 and 300 mm; optional 150 mm | Chuck | Horseshoe |
| PRE-301 | 3 | 200 and 300 mm; optional 150 mm | Pin | Blade |
| PRE-350 | 1 | 200 and 300 mm; optional 150 mm | Chuck | Horseshoe |
Installation and Replacement Boundary
Model-specific setup data must follow the identified base model and the host system configuration.
- Confirm the PRE-series model, wafer diameter, pin or chuck loading arrangement, controller, and configuration files before installation or substitution.
- The manufacturer family manual requires alignment when a pre-aligner is first installed, replaced, moved, or involved in a wafer-transfer error.
- Do not substitute specifications from nearby Brooks 6-0000 or 6-0002 assembly numbers; those identifiers represent distinct configurations.
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $2,970.00 to $6,730.00. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS AUTOMATION Pre-Aligner PN 6-0000-3066-PC