Brooks Instrument 5964 Series Metal-Sealed Mass Flow Controller
About this part
5964SERIES is the Sonisys archive identifier for the Brooks Instrument Model 5964 metal-sealed thermal mass flow controller series. The official Brooks 5964/5850EM manual describes Model 5964 for high-purity and high-vacuum gas-flow systems, with an electropolished 7 Ra flow path, enhanced-response electronics, analog signal options, and configuration-dependent process connections. Gas calibration, full-scale range, valve configuration, connection style, I/O option, pressure rating, and interchangeability must be verified from the complete configured model code, physical label, and calibration records
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
5964SERIES
Official model family
Brooks Instrument Model 5964 metal-sealed mass flow controller
Function
Measurement and control principle
Thermal mass flow sensing with an integral control valve for gas-flow measurement and regulation
Flow
Selectable full-scale range
Official 5964/5850EM manual lists ranges from 3 sccm through 30,000 sccm nitrogen equivalent, with lower flows available by factory consultation
Performance
Accuracy
1% of full scale including linearity at calibration conditions; 1.5% of full scale for flow ranges above 20 slpm
Repeatability
0.25% of rate
Model 5964 settling time
Enhanced-response PCB: less than 1 second to within 2% of full scale of final value for a 0-100% command step with a normally closed valve
Control range
2-100% with an elastomeric valve seat or 3-100% with a metal or Teflon valve seat; installed seat is configuration-specific
Ratings
Operating pressure boundary
Manual lists 1,500 psi maximum, with 150 psi for enhanced-response configurations and 500 psi for the stainless-steel-fastener option; use the configured-unit rating
Ambient temperature limits
Operating 40-150 degrees F (5-65 degrees C); non-operating -13 to 212 degrees F (-25 to 100 degrees C)
Materials
Leak integrity
Inboard-to-outboard helium leak rate of 1 x 10^-10 atm cc/sec maximum
Wetted construction
316L VAR stainless steel, 316L stainless steel, and high-alloy ferritic stainless steel with nickel internal and external seals
Model 5964 surface finish
7 Ra, electropolished
Connections
Process connection options
Official manual covers 1/4-inch tube VCR, downport C-seal, and downport W-seal configurations; the installed connection is configuration-specific
Electrical
Electrical connection options
20-pin card-edge or 15-pin D-connector configurations are documented; the installed connector is configuration-specific
Analog I/O options
0-5 Vdc command/output or 4-20 mA command with jumper-selectable 4-20 mA or 0-20 mA output, depending on configured electronics
Configuration
Configured-unit rule
Gas, calibration range, valve state and seat, process connection, electrical interface, supply requirements, pressure limit, and calibration orientation must be verified from the complete model code, physical label, and calibration documentation
