Flow Control
5964D4
Brooks Instrument Thermal Mass Flow Controller Or Meter
About this part
5964D4 is an exact identifier associated with the Brooks legacy mass-flow instrumentation. It is classified here as a thermal mass flow controller or meter. Gas, range, valve or meter state, wetted materials, fittings, power, signal, channel count, and OEM suffix are exact-unit values
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer or brand family | Brooks Instrument |
| Exact archived identifier | 5964D4 |
| Product family | Brooks legacy mass-flow instrumentation |
| Equipment type | Thermal mass flow controller or meter |
| Documented or observed role | Measures gas mass flow with a thermal sensor, on controller configurations, regulates flow through an integral valve |
| Unit-specific boundary | Gas, range, valve or meter state, wetted materials, fittings, power, signal, channel count, and OEM suffix are exact-unit values |
| Gas and range | Nameplate and calibration-record values; archived listing values apply only to the observed unit |
| Principle | Thermal gas mass-flow measurement for applicable meter/controller configurations |
| Replacement rule | Match full model code, electrical interface, plumbing, and calibrated gas/range |
Configuration and Replacement Boundary
Use the complete 5964D4 marking together with the unit nameplate, revision, calibrated range, electrical interface, mechanical connections, and host-equipment documentation. A family resemblance or partial code match does not establish interchangeability.
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerRecorded price context is shown when available. Based on 0 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument MFC Mass Flow Controller H2 200 SCCM RS485 1500psig