Flow Control

5964C2MAPW5KA

Brooks Instrument Thermal Mass Flow Controller Or Meter

About this part

5964C2MAPW5KA is an exact identifier associated with the Brooks legacy mass-flow instrumentation. It is classified here as a thermal mass flow controller or meter. Gas, range, valve or meter state, wetted materials, fittings, power, signal, channel count, and OEM suffix are exact-unit values

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Photos (0)Listing history

No archived photo available

Key Facts

ManufacturerBrooks legacy mass-flow instrumentation

Part number5964C2MAPW5KA

Product familyConfiguration-specific

Device typeThermal Mass Flow Device

Configuration statusConfiguration varies

Application classIndustrial automation and process equipment

CategoryFlow Control

Specifications

Identification

Manufacturer or brand family	Brooks Instrument
Exact archived identifier	5964C2MAPW5KA
Product family	Brooks legacy mass-flow instrumentation
Equipment type	Thermal mass flow controller or meter

Function

Documented or observed role

Measures gas mass flow with a thermal sensor, on controller configurations, regulates flow through an integral valve

Configuration

Unit-specific boundary	Gas, range, valve or meter state, wetted materials, fittings, power, signal, channel count, and OEM suffix are exact-unit values
Gas and range	Nameplate and calibration-record values; archived listing values apply only to the observed unit

Measurement

Principle

Thermal gas mass-flow measurement for applicable meter/controller configurations

Compatibility

Replacement rule

Match full model code, electrical interface, plumbing, and calibrated gas/range

Configuration and Replacement Boundary

Use the complete 5964C2MAPW5KA marking together with the unit nameplate, revision, calibrated range, electrical interface, mechanical connections, and host-equipment documentation. A family resemblance or partial code match does not establish interchangeability.

Archived Unit Context

These statements preserve what sellers recorded for individual units without turning listing text into family-wide specifications.

Brooks 5964 Mass Flow Controller 5964C2MAPW5KA WF6 750 SCCM 01-0624R-088

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$400.00Based on archived listing records

Recorded price range$400.00 - $400.00Low to high recorded listing price

Local documents0PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $400.00 to $400.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

Brooks 5964 Mass Flow Controller 5964C2MAPW5KA WF6 750 SCCM 01-0624R-088

Archived listings

Other Part Numbers & Aliases

5964C2MAPW5KABrooks Instrument 5964C2MAPW5KA