Flow Control
5866RC1A1C4R2VA
Brooks Instrument 5866RT Pressure Controller/Flowmeter
About this part
5866RC1A1C4R2VA is a configured Brooks Instrument 5866RT-family pressure controller/flowmeter identifier observed in Sonisys auction records and external semiconductor surplus inventory. Official Brooks 5866RT documentation identifies the platform as a remote-transducer electronic pressure controller/flowmeter that controls upstream or downstream pressure while measuring mass flow through the control valve. Exact gas calibration, flow range, valve behavior, seal package, fittings, and pressure-transducer range must be verified from the physical unit label or build documentation because the official PDFs are family-level documents and do not name this complete configured code
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part number5866RC1A1C4R2VA
Product familyConfiguration-specific
Device typeFlowmeter
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | Remote-transducer electronic pressure controller/flowmeter |
| Series family | Brooks Model 5866RT pressure controller/flowmeter |
| Configured model code | 5866RC1A1C4R2VA |
Function
| Pressure-control function | Maintains a desired upstream or downstream pressure by comparing a remote pressure-transducer signal to the setpoint and modulating the integral control valve |
| Flow-measurement function | Measures mass flow through the control valve and provides a 0-5 V signal proportional to mass flow |
| Mass-flow-controller mode | 5866RT can be configured as a mass flow controller for calibration or test purposes |
Pressure
| Control architecture | Remote pressure sensor input with adjustable integral PID control electronics and top-access tuning switches |
| Pressure-control range | 100:1 when used with a remote transducer that has a 0-10 V output |
| Pressure response time | Less than 0.8 seconds typical for a 0-100% command step with less than 2% pressure overshoot; actual response depends on system design |
| Remote pressure sensor compatibility | Suitable for pressure sensors with 0-5 V or 0-10 V output signals |
Flow
| Family flow range | Brooks 5866RT data sheet lists configurable flow ranges from 0-3 sccm to 0-30,000 sccm nitrogen equivalent at SEMI standard reference conditions |
| Flow output signal | 0-5 Vdc, 1 kOhm maximum load |
| Flow accuracy | +/-1.0% full scale including linearity at calibration conditions for 3-10,000 sccm nitrogen equivalent; +/-1.5% full scale for flow rates greater than 20 slpm |
| Flow repeatability | +/-0.25% of rate |
Controls
| Pressure setpoint signal | 0-5 Vdc or 0-10 Vdc command, with 5 Vdc reference output available for setpoint generation |
| Valve override | Electrically activated valve override is part of the 5866RT control platform |
Electrical
| Electrical connector | 15-pin D-connector, DA-15P |
| Power requirement, normally closed valve | 3.5 W; +15 Vdc +/-5% at 35 mA and -15 Vdc +/-5% at 180 mA |
| Power requirement, normally open valve | 10.5 W; +/-15 Vdc +/-5% at 350 mA |
Ratings
| Operating temperature range | 32 to 150 degrees F (0 to 65 degrees C) |
| Pressure Equipment Directive context | Brooks data sheet lists PED 97/23/EC Sound Engineering Practice for the 5866RT platform |
Materials
| Wetted parts | Standard wetted parts are 316L and 316L VAR stainless steel |
| Valve seat options | Standard Viton fluoroelastomer or metal valve seat depending on configured model code |
| Seal options | External and internal seals can be fluoroelastomer or metal, with Buna-N, Teflon, or Kalrez options depending on configuration |
Connections
| Standard mechanical connections | 1/8 in or 1/4 in stainless steel compression fittings on standard 5866RT configurations |
| Optional mechanical connections | 1/4 in VCO or VCR options; 5866RT(M) metal-sealed configuration uses 1/4 in VCR |
Installation
| Mounting orientation | May be installed in any position |
| Filter recommendation | Brooks recommends an upstream in-line filter for elastomer 5866RT installations to help prevent foreign material from entering the meter |
Applications
| Application domain | Upstream or downstream gas pressure control with simultaneous flow measurement, including vacuum-chamber pressure regulation, inert-gas feed control, process-vessel pressure control, and flow-related calibration or test service |
Observed configuration
| Observed gas and flow context | Stored auction evidence and external surplus inventory describe this configured identifier with argon service and 3 SLM flow context; verify against the physical label before using as a technical specification |
| Observed connection and electrical context | External surplus inventory describes this configured identifier with VCR and 15-pin context; verify fitting size, connector, and pinout from the physical unit and Brooks documentation |
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records3Tracked historical listing records
Historical median price$310.56Based on archived listing records
Recorded price range$199.99 - $340.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $222.10 to $334.11. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument 5866RC1A1C4R2VA Pressure Controller Ar 3 SLPM 5866RT USED
- 5866RC1A1C4R2VA / 5866RT PRESSURE CONTROLLER GAS AR FS FLOW RATE 3 SLPM / BROOKS
- Brooks 5866 5866RC1A1C4R2VA Pressure Controller 3 SLPM Flow Rate 5866RT
Archived listings
Other Part Numbers & Aliases
5866RC1A1C4R2VABrooks 5866RC1A1C4R2VABrooks Instrument 5866RC1A1C4R2VA