Brooks Instrument 5800S Smart-Series Digital Mass Flow Meter
About this part
5860S is a Brooks Instrument 5800S Smart-Series digital thermal mass flow meter for gas-flow measurement. Official Brooks documentation covers 5860S among the Smart-Series mass flow meter models and describes a microprocessor-based instrument with analog flow output, RS-232 or RS-485 digital communication, configurable output signal type, diagnostics, and optional Profibus-DP support depending on the configured electronics. Gas, full-scale flow, fittings, seal materials, output selection, network interface, calibration, and customer-specific suffixes vary by configured model code and must be verified from the physical unit label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as AIR at 3.5 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Smart-Series digital thermal mass flow meter
Series family
Brooks 5800S Smart-Series digital mass flow meters and controllers
Official meter model coverage
Brooks documentation covers Smart Mass Flow Meter models 5860S, 5861S, 5863S, and 5864S
Function
Primary function
Measures gas mass flow and provides an electrical output signal as a function of flow rate
Flow
5860S flow range
0.003 to 30 ln/min nitrogen equivalent at normal conditions of 0 C and 1013.25 mbar
Performance
Accuracy
+/-0.7% of rate and +/-0.2% full scale at calibration conditions; optional +/-0.5% of rate and +/-0.1% full scale
Repeatability
+/-0.25% of rate
Rangeability
50:1 within specified accuracy
Stability
Less than +/-0.5% of rate per year
Pressure
5860S pressure rating
100 bar standard pressure rating with 300 bar version optional
Environmental
Temperature range
Ambient and process gas: 0 C to 70 C
Materials
Wetted materials
Stainless steel wetted parts with Viton, Buna-N, PTFE/Kalrez, or EPDM seals depending on configuration
Mechanical
Process connection options
NPT(F), tube compression, VCR, VCO, downport, and optional DIN or ANSI flanged connections depending on configured model code
Electrical
Electrical connector
15-pin D-type connector with gold-plated contacts
Analog flow output
0-5 Vdc, 1-5 Vdc, 0-20 mA, or 4-20 mA proportional to mass flow depending on configured output
Power requirement
+15 to +28 Vdc or +/-15 Vdc depending on configuration
5860S meter power consumption
+24 Vdc +/-10% at 80 mA, 120 mA for Profibus, or +15 Vdc +/-5% at 90 mA
Controls
Digital communication
RS-232 or RS-485 communication with selectable baud rates from 1200 to 38K4; Profibus-DP up to 12 Mbit/sec when equipped with the Profibus interface
Diagnostics
TTL open-collector alarm output and self-diagnostic details available through digital communication
Calibration storage
Digital communication features include calibration access and storage of up to 10 calibration curves
Configuration
Configured-unit rule
Gas, full-scale range, fittings, seal package, output type, communication interface, calibration, pressure option, and customer suffixes vary by configured model code and physical nameplate
Applications
Application domain
Gas mass-flow measurement for analytical, laboratory, process gas, semiconductor, and other industrial gas-handling systems
Observed variants
Stored auction gas/range combinations
Stored Sonisys auction records include AIR 3.5 SCCM, AIR 1000 SCCM, AIR 10 SLM, 30 SCFH, and AIR-only listing contexts; these are observed listing configurations, not model-wide specifications
