5860IA13RB2EA is a configured Brooks Instrument 5860i thermal mass flow meter identifier. Official Brooks Model 5860i documentation describes the 5860i as a gas mass flow measurement device with a flow sensor and integral electronic signal conditioner. Stored Sonisys auction records repeatedly identify this configured code as an air mass flow sensor at 500 SCCM; that gas/range detail is retained as observed configuration evidence and should be confirmed from the physical unit label or calibration documentation
Unit-specific configuration
Observed configuration
Historical listing records identify this part as Air at 500 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Thermal mass flow meter for gases
Model family
Brooks Instrument Model 5860i Series
Configured part identifier
5860IA13RB2EA
Official manual identity
Brooks Model 5860i Mass Flow Meter, installation and operation manual X-TMF-5860i-MFM-eng, part number 541B110AAG, November 2008
Function
Primary function
Measures gas mass flow and provides an electrical flow output signal
Internal measurement architecture
Official manual describes the instrument as a flow sensor with integral electronic signal conditioner
Flow
Standard full-scale range
Any full-scale flowrate from 3 sccm to 30 slpm nitrogen equivalent
Reference conditions
SEMI standard conditions of 0 C and 101.3 kPa / 760 Torr; other reference standard conditions may be specified at ordering
Performance
Accuracy
+/-1% full scale including linearity at calibration conditions; +/-1.5% full scale for flow ranges greater than 20 slpm
Repeatability
0.25% of rate
Response time
Less than 6 seconds to within 2% of full-scale final value for a 0 to 100% flow step
Usable range
50:1
Pressure
Maximum working pressure
4500 psi / 31.03 MPa maximum
Environmental
Operating temperature
5 C to 65 C / 40 F to 150 F
Non-operating temperature
-25 C to 100 C / -13 F to 212 F
Electrical
Power requirement
+15 to +28 Vdc at 90 mA
Output signal
0-5 Vdc into 2000 ohms or greater; jumper-selectable 4-20 mAdc or 0-20 mAdc current output
Electrical connector
D-type 15-pin DA-15P connector
Mechanical
Standard gas connections
1/4 inch compression fittings for flow rates up to 10 slpm; 3/8 inch compression fittings for higher flow rates
Optional gas connections
1/8 inch compression, VCO, and VCR connections available by configuration
Leak integrity
External leak integrity
1 x 10^-9 atm scc/sec helium
Observed variants
Stored auction gas/range combination
Stored Sonisys auction titles identify this configured code with air service at 500 SCCM
Calibration
Configured-unit rule
Gas calibration, full-scale range, reference conditions, output option, connector wiring, fittings, pressure rating, and any customer-specific suffixes vary by configured model code and physical unit label
Compatibility
Verification boundary
Verify unit label, gas, full-scale flow, output option, fittings, calibration date, pressure rating, connector wiring, and intended gas compatibility before reuse
