Flow Control

5860IA134B2EA

Brooks Instrument 5860i Mass Flow Meter

About this part

5860IA134B2EA is a configured Brooks Instrument 5860i thermal mass flow meter identifier. Official Brooks Model 5860i documentation describes the 5860i as a gas mass-flow measurement device with a flow sensor and integral electronic signal conditioner. Stored Sonisys auction records identify this configured code as a Brooks 5860i mass flow sensor/meter and include 30 SLPM and 20 SLPM listing contexts; those gas/range details are retained as observed auction evidence and should be confirmed from the physical unit label and calibration records

Unit-specific configuration
Observed configuration

Historical listing records identify this part as 30 SLPM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part number5860IA134B2EA
Product familyConfiguration-specific
Device typeFlow Meter
Observed full-scale range30 SLPM
Configuration statusVerify from unit label
Application classIndustrial automation and process equipment
CategoryFlow Control

Specifications

Identification
Device typeThermal mass flow meter for gases
Model familyBrooks Instrument Model 5860i Series
Configured part identifier5860IA134B2EA
Official manual identityBrooks Model 5860i Mass Flow Meter, installation and operation manual X-TMF-5860i-MFM-eng, part number 541B110AAG, November 2008
Function
Primary functionMeasures gas mass flow and provides an electrical flow output signal
Internal measurement architectureOfficial manual describes the instrument as a flow sensor with integral electronic signal conditioner
Flow
Standard full-scale rangeAny full-scale flowrate from 3 sccm to 30 slpm nitrogen equivalent
Reference conditionsSEMI standard conditions of 0 C and 101.3 kPa / 760 Torr; other reference standard conditions may be specified at ordering
Performance
Accuracy+/-1% full scale including linearity at calibration conditions; +/-1.5% full scale for flow ranges greater than 20 slpm
Repeatability0.25% of rate
Response timeLess than 6 seconds to within 2% of full-scale final value for a 0 to 100% flow step
Usable range50:1
Pressure
Maximum working pressure4500 psi / 31.03 MPa maximum
Environmental
Operating temperature5 C to 65 C / 40 F to 150 F
Non-operating temperature-25 C to 100 C / -13 F to 212 F
Electrical
Power requirement+15 to +28 Vdc at 90 mA
Output signal0-5 Vdc into 2000 ohms or greater; jumper-selectable 4-20 mAdc or 0-20 mAdc current output
Electrical connectorD-type 15-pin DA-15P connector
Mechanical
Standard gas connections1/4 inch compression fittings for flow rates up to 10 slpm; 3/8 inch compression fittings for higher flow rates
Optional gas connections1/8 inch compression, VCO, and VCR connections available by configuration
Leak integrity
External leak integrity1 x 10^-9 atm scc/sec helium
Observed variants
Stored auction gas/range contextStored Sonisys titles include 30 SLPM and 20 SLPM contexts for this configured code; confirm exact calibration from the unit label
Calibration
Configured-unit ruleGas calibration, full-scale range, reference conditions, output option, connector wiring, fittings, pressure rating, and customer-specific suffixes vary by configured model code and physical unit label
Compatibility
Verification boundaryVerify unit label, gas, full-scale flow, output option, fittings, calibration date, pressure rating, connector wiring, and intended gas compatibility before reuse

Documentation Downloads

Local PDF copies

Part Photos

7 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records5Tracked historical listing records
Historical median price$200.00Based on archived listing records
Recorded price range$64.99 - $1,450.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $96.99 to $950.00. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Instruments 5860I Mass Flow Sensor 5860IA134B2EA
  • Brooks Instruments 5860I, Mass Flow Sensor, 5860IA134B2EA
  • Brooks Mass Flow Sensor 5860 - Flow: 30 SLPM - 5860IA134B2EA

Archived listings

Other Part Numbers & Aliases

5860IA134B2EABrooks 5860IA134B2EABrooks Instrument 5860IA134B2EABrooks Instruments 5860IA134B2EABrooks 5860i 5860IA134B2EABrooks Instrument 5860i 5860IA134B2EA5860IA134B2EA Mass Flow Meter5860IA134B2EA Mass Flow Sensor