5860i is a Brooks Instrument thermal mass flow meter for gas flow measurement. The official Brooks Model 5860i installation and operation manual describes it as a mass flow measurement device for accurately measuring gas flows, with a flow sensor and integral electronic signal conditioner. Auction history shows configured units with air, nitrogen, and carbon dioxide contexts plus model-code variants such as 5860IA13RB2EA, 5860IA13VB2EA, and 5860IA134B2EA. Exact gas calibration, full-scale range, fitting, output option, and customer configuration must be verified from the physical unit label and calibration records
Unit-specific configuration
Observed configuration
Historical listing records identify this part as AIR at 1000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
5860I / 5860i
Device type
Thermal mass flow meter for gases
Manufacturer lineage
Brooks Instrument gas flow measurement and control products
Official manual identity
Brooks Model 5860i Mass Flow Meter, installation and operation manual X-TMF-5860i-MFM-eng, part number 541B110AAG, November 2008
Function
Primary function
Measures gas mass flow and provides an electrical flow output signal
Internal measurement architecture
Official manual describes the instrument as a flow sensor with integral electronic signal conditioner
Flow
Standard full-scale range
Any full-scale flowrate from 3 sccm to 30 slpm nitrogen equivalent
Reference conditions
SEMI standard conditions of 0 C and 101.3 kPa / 760 Torr; other reference standard conditions may be specified at ordering
Performance
Accuracy
+/-1% full scale including linearity at calibration conditions; +/-1.5% full scale for flow ranges greater than 20 slpm
Repeatability
0.25% of rate
Response time
Less than 6 seconds to within 2% of full-scale final value for a 0 to 100% flow step
Usable range
50:1
Pressure
Maximum working pressure
4500 psi / 31.03 MPa maximum
Environmental
Operating temperature
5 C to 65 C / 40 F to 150 F
Non-operating temperature
-25 C to 100 C / -13 F to 212 F
Electrical
Power requirement
+15 to +28 Vdc at 90 mA
Output signal
0-5 Vdc into 2000 ohms or greater; jumper-selectable 4-20 mAdc or 0-20 mAdc current output
Electrical connector
D-type 15-pin DA-15P connector
Mechanical
Standard gas connections
1/4 inch compression fittings for flow rates up to 10 slpm; 3/8 inch compression fittings for higher flow rates
Optional gas connections
1/8 inch compression, VCO, and VCR connections available by configuration
Leak integrity
External leak integrity
1 x 10^-9 atm scc/sec helium
Calibration
Configured-unit rule
Gas calibration, full-scale range, reference conditions, output option, connector wiring, fittings, and any customer-specific suffixes vary by configured model code
Observed variants
Stored auction gas/range combinations
AIR 1000 SCCM (6), AIR 500 SCCM (6), AIR 2000 SCCM (5), AIR 10 SLM (3), AIR (1), plus stored title contexts for nitrogen and carbon dioxide
Stored model-code examples
5860IA13RB2EA, 5860IA13VB2EA, and 5860IA134B2EA appear in stored auction titles
Compatibility
Verification boundary
Verify unit label, gas, full-scale flow, output option, fittings, calibration date, pressure rating, connector wiring, and intended gas compatibility before reuse
