Brooks Instrument Smart-Series Thermal Mass Flow Controller
About this part
5853S/BF2CA3ID is a configured Brooks Instrument 5853S/BF Smart-Series thermal mass flow controller identifier. Official Brooks 5800-S documentation identifies 5853S/BF as a mass flow controller base with a 200 to 300 ln/min N2-equivalent full-scale range class, and the visible configured suffix decodes to 3/4 inch tube compression fittings, Viton seal and valve-seat material, normally closed low-differential-pressure 5853-series valve, digital communication only, and certified Profibus-DP communication context. Stored auction evidence associates this identifier with the longer observed marking 5853S/BF2CA3ID0AA1B1 and O2/air listing context, but gas calibration and full-scale setting must be verified from the physical label or calibration record
Configurations vary. Verify the exact unit before choosing a replacement.
Application classIndustrial automation and process equipment
CategoryFlow Control
Specifications
Identification
Part identifier
5853S/BF2CA3ID
Official base model
Brooks 5853S/BF Smart-Series mass flow controller
Series family
5800-S Smart-Series digital mass flow meters and controllers
Flow
5853S/BF flow range context
200 to 300 ln/min full-scale range class referenced to normal conditions; actual gas and calibrated full-scale value are configured per unit
Mechanical
Process connection code
2C: 3/4 inch tube compression fittings for 5853/5863 models
Materials
Seal and valve-seat code
A: Viton
Controls
Valve code
3: normally closed valve for 5853 series pressure differential below 2 bar
Smart-Series features
Digital communication can expose flow, setpoint, totalizer, ambient temperature, operating settings, calibration data, controller settings, PID settings, and diagnostics
Electrical
Input/output code
I: digital communication only
Main connector context
Brooks 5800-S documentation identifies a 15-pin D-type / Sub-D connector with gold-plated contacts for Smart TMF electrical interfacing
Communications
Communication code
D0: Profibus-DP, PNO certified, for applicable Smart Mass Flow configurations
Performance
5853 standard response context
Brooks 5800-S documentation lists standard 5853 controller settling time as 3 seconds, with better than 1 second available on request
Family accuracy context
+/-0.7% of rate and +/-0.2% full scale at calibration conditions; for 5853/5863 flow rates above 1100 ln/min, Brooks lists +/-1.0% full scale
Family repeatability
+/-0.25% of rate
Pressure
5853 pressure rating context
Brooks 5800-S documentation lists the 5853S/5863S row at 70 bar pressure rating and notes maximum delta P for 5853S is 20 bar
Environmental
Family temperature context
Brooks 5800-S documentation lists ambient and process gas temperature from 0 deg C to 70 deg C
Configuration
Configured-unit rule
Gas calibration, full-scale setting, calibration gas, pressure conditions, remaining suffix positions, and calibration paperwork remain unit-specific even when the visible Brooks model code identifies base range, fittings, material, valve, and communication context
