Flow Control

5853IABA2D1D30A

Brooks Instrument 5853i High-Flow Mass Flow Controller

About this part

5853IABA2D1D30A is a configured Brooks Instrument 5853i high-flow thermal mass flow controller. The 5853 platform measures and controls gas flow with a thermal sensor, control electronics and an integral valve. The complete code identifies a factory configuration, so gas, full-scale range, fittings, seal material, analog interface and pressure rating must be confirmed from the nameplate and calibration certificate

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Documents (2)Photos (4)Listing history

Brooks Instrument 5853IABA2D1D30A configured high-flow thermal mass flow controller auction image

Archived part photo · View gallery

Key Facts

ManufacturerBrooks Instrument

Part number5853IABA2D1D30A

Product familyConfiguration-specific

Device typeMass Flow Controller

Configuration statusConfiguration varies

Application classIndustrial automation and process equipment

CategoryFlow Control

Specifications

Identification

Base model

Brooks 5853i high-flow mass flow controller

Function

Primary function

Measures and controls gas mass flow using a thermal sensor and integral control valve

Flow

5853 family range context

100 to 1000 lpm nitrogen-equivalent full-scale range in the Brooks 5800-series data-sheet table

Performance

Flow accuracy context	1% of full scale including linearity at calibration conditions
Control range	50:1
Repeatability and reproducibility	0.25% of rate
Response	Less than 3 seconds to within 2% of final value for a 0-100% command step

Environment

Operating temperature

5 to 65 C

Leak integrity

External leak integrity

1 x 10^-9 atm cc/sec helium

Materials

Primary wetted materials

316L and high-alloy stainless steel with configuration-dependent elastomers

Configuration

Configured-unit rule

Gas, full-scale flow, fittings, valve, seal, signal, pressure and calibration details depend on the complete model code and nameplate

Configured-unit verification

High-flow 5853i units must be matched by their complete configuration and calibration.

Confirm the calibrated gas and full-scale flow.
Verify the process connection, valve behavior and seal package.
Match the analog input/output and supply wiring.
Use the nameplate pressure rating for this configured unit.

Documentation Downloads

Local PDF copies

Brooks 5853/5863 Installation and Operation Manual Local PDF download

PDF5.0 MB

Brooks 5800E Series Data Sheet Local PDF download

PDF698 KB

Part Photos

4 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$1,250.00Based on archived listing records

Recorded price range$1,250.00 - $1,250.00Low to high recorded listing price

Local documents2PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $1,250.00 to $1,250.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

BROOKS INSTRUMENT 5853IABA2D1D30A 15-28VDC 2250PSI NSNP

Archived listings

Other Part Numbers & Aliases

5853IABA2D1D30ABrooks 5853IABA2D1D30ABrooks Instrument 5853IABA2D1D30A