5853I is a Brooks Instrument high-flow thermal mass flow controller model identifier in the Brooks 5800-series flow-control platform. Official Brooks 5853/5863 documentation supports the 5853 controller and paired 5863 meter platform, while stored Sonisys auction records use 5853i/5853I wording and include 1000 SLPM and 350 SLPM air configured-unit contexts. Exact gas, full-scale range, fittings, pressure conditions, wiring option, calibration, and customer-specific suffix details must be verified from the physical unit label and calibration paperwork
Unit-specific configuration
Observed configuration
Historical listing records identify this part as 1000 SLPM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Thermal mass flow controller for gases
Model family
Brooks Instrument Model 5853 / 5853i high-flow mass flow controller; paired in Brooks 5853/5863 documentation with the 5863 mass flow meter
Part identifier
5853I / 5853i
Official manual boundary
Brooks 5853/5863 documentation covers the high-flow controller/meter platform; exact 5853i configured options must be checked from the unit label
Function
Primary function
Measures and controls gas mass flow using a thermal mass-flow sensor, control electronics, and an integral control valve
Flow
High-flow family context
Brooks 5853/5863 and 5800-series documentation places the 5853 controller in high-flow gas mass-flow service; exact full-scale range is configuration-specific
5853/5863 N2-equivalent range context
Brooks 5800E family data-sheet context lists the 5853/5863 model row at 100 lpm minimum full scale to 1000 lpm maximum full scale, N2 equivalent
Performance
Flow accuracy context
Brooks 5800-series data-sheet context lists 1% full scale accuracy including linearity at calibration conditions
Control range context
Brooks 5800-series data-sheet context lists 50:1 control range for controller models
Repeatability and reproducibility context
Brooks 5800-series data-sheet context lists 0.25% of rate
Pressure
5853/5863 pressure rating context
Brooks 5800-series data-sheet context lists 1000 psi / 70 bar standard pressure rating for the 5853/5863 model row, with exact connection and PED category dependent on configuration
Environmental
Operating temperature context
Brooks 5800-series data-sheet context lists 5 C to 65 C operating temperature range
Brooks 5800-series data-sheet context lists 316L stainless steel, high alloy stainless steel, Viton fluoroelastomers, Buna-N, Kalrez, and Teflon as primary wetted material context
Electrical
Electrical connection context
Brooks 5800-series documentation identifies 15-pin D-sub and controller card-edge connection contexts; verify the exact 5853i connector and wiring option from the unit label and manual
Signal context
Brooks documentation includes analog voltage output and setpoint wiring contexts for 5800-series controllers; exact voltage/current options are configured-unit details
Mechanical
Connection context
5853 high-flow units may use fittings or flange configurations depending on ordered model code; process connection size and style are not fixed by the short 5853I identifier
Configuration
Configured-unit rule
Gas calibration, full-scale range, process fittings, valve option, output/input signal option, pressure rating, and customer-specific suffixes vary by configured model code and physical nameplate
Observed variants
Stored auction gas/range combinations
Stored Sonisys titles include 1000 SLPM and 350 SLPM air configured-unit contexts; these are observed listing contexts, not model-wide official specifications
Applications
Application domain
High-flow gas mass-flow control in semiconductor, laboratory, process, and industrial gas-handling systems
Compatibility
Verification boundary
Do not assume interchangeability with 5853E, 5853S, SLA5853, 5863 meters, or another configured Brooks unit without checking gas, range, fittings, signal option, wiring, pressure rating, and calibration
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records4Tracked historical listing records
Historical median price$1,125.00Based on archived listing records
Recorded price range$199.99 - $1,650.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $364.99 to $1,605.00. Based on 4 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks Instrument 5853i Mass Flow Controller
Brooks Instruments 5853i Mass Flow Controller
Brooks Instrument 5853I Mass Flow Controller 1000 SLPM
