Flow Control
5853E
Brooks Instrument 5800E Series Mass Flow Controller
About this part
5853E is a Brooks Instrument 5800E Series elastomer-sealed analog thermal gas mass flow controller model. Official Brooks 5800E documentation explicitly names 5853E in the high-flow controller row paired with 5863E meter models. Gas calibration, full-scale range, fittings or flanges, valve option, pressure conditions, and customer-specific suffix details remain configured-unit details that must be verified from the physical unit label and calibration paperwork
Unit-specific configuration
Observed configuration
Historical listing records identify this part as 1000 SLPM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part number5853E
Product familyConfiguration-specific
Device typeMass Flow Controller
Observed full-scale range1000 SLPM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Part identifier | 5853E |
| Device type | Elastomer-sealed analog thermal gas mass flow controller |
| Series family | Brooks 5800E Series elastomer-sealed general-purpose gas mass flow controllers and meters |
| Official covered models | Brooks 5800E documentation covers controller models 5850E, 5851E, and 5853E and meter models 5860E, 5861E, and 5863E |
| Related meter model | Brooks documentation pairs the 5853E controller range context with the 5863E mass flow meter |
Function
| Primary function | Measures gas mass flow with a thermal sensor and controls flow through an integral valve and analog control electronics |
Flow
| 5853E N2-equivalent full-scale range context | Brooks 5800E documentation lists the 5853 / 5863 model row at 100 to 1000 lpm nitrogen-equivalent full-scale range |
Performance
| Flow accuracy context | Brooks 5800E documentation lists +/-1% full-scale flow accuracy including linearity at calibration conditions |
| Control range context | Brooks 5800E documentation lists 50:1 control range for controller models |
| Repeatability and reproducibility context | Brooks 5800E documentation lists 0.25% of rate |
| Response time context | Brooks 5800E documentation lists settling time under 3 seconds to within +/-2% full scale for a 0 to 100% command step |
Pressure
| 5853E pressure rating context | Brooks 5800E documentation lists the 5853 / 5863 model row at 1000 psi / 70 bar standard pressure rating, with PED category dependent on connection configuration |
| 5853E controller differential-pressure context | Brooks 5800E documentation lists minimum controller differential pressure of 7.5 psi / 0.52 bar below 500 lpm and 11.8 psi / 0.81 bar above 500 lpm, with maximum differential pressure context of 290 psi / 20 bar |
Environmental
| Operating temperature context | Brooks 5800E documentation lists 5 to 65 deg C (41 to 149 deg F) operating temperature range |
Leak integrity
| External leak integrity context | Brooks 5800E documentation lists 1 x 10^-9 atm cc/sec helium external leak integrity |
Materials
| Primary wetted materials context | Brooks 5800E documentation lists 316L stainless steel, high alloy stainless steel, Viton fluoroelastomers, Buna-N, Kalrez, and Teflon as primary wetted-material context |
Electrical
| Electrical connection context | Brooks 5800E documentation lists a 15-pin male D-sub connector or card-edge connector for controller models, depending on configuration |
| Setpoint and output context | Brooks 5800E documentation lists 0 to 5 Vdc setpoint input and 0 to 5 Vdc output signal context for controller models |
| Power context | Brooks 5800E documentation lists +/-15 Vdc supply context, with power draw dependent on valve state and configured flow range |
Mechanical
| 5853E process connection context | Brooks 5800E documentation lists 5853E fitting and flange configurations including female pipe thread, tube compression, VCO, VCR, ANSI flanges, and DIN flanges; the exact connection must be verified from the configured model code and physical unit |
Configuration
| Configured-unit rule | Gas calibration, full-scale flow, process connection, valve option, seal package, pressure conditions, and customer-specific suffixes vary by configured model code and physical nameplate |
Observed variants
| Stored auction gas/range contexts | Stored Sonisys auction titles include 1000 SLPM and air 250 SLPM configured-unit contexts; these are observed listing contexts, not model-wide official specifications |
Applications
| Application domain | Gas mass-flow control in chemical and petrochemical research, laboratory, analytical, fuel-cell, life-science, semiconductor, and industrial gas-handling applications |
Compatibility
| Verification boundary | Do not assume interchangeability with 5850E, 5851E, 5863E meters, 5853I, 5853S, SLA5853, or any configured Brooks unit without checking gas, range, fittings, signal option, wiring, pressure rating, and calibration |
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records6Tracked historical listing records
Historical median price$1,362.73Based on archived listing records
Recorded price range$855.00 - $1,691.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $902.63 to $1,691.00. Based on 6 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Mass Flow Controller 5853E
- LowTariff✅Brooks Smart Mass Flow Controller 5853E
Archived listings
Other Part Numbers & Aliases
5853EBrooks 5853EBrooks Instrument 5853E