Flow Control
5851S
Brooks Instrument Thermal Mass Flow Controller
About this part
5851S is an exact identifier associated with the Brooks 5800S Smart Mass Flow Series. It is classified here as a thermal mass flow controller. Gas, full-scale range, valve, seals, fittings, signal type, communications, and OEM suffix are exact-unit selections
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer or brand family | Brooks Instrument |
| Exact archived identifier | 5851S |
| Product family | Brooks 5800S Smart Mass Flow Series |
| Equipment type | Thermal mass flow controller |
| Documented or observed role | Measures and controls gas mass flow with a thermal sensor, integral control valve, and configurable analog or digital electronics |
| Unit-specific boundary | Gas, full-scale range, valve, seals, fittings, signal type, communications, and OEM suffix are exact-unit selections |
| Gas and range | Must be read from the nameplate or calibration record |
| Principle | Thermal gas mass-flow measurement |
| Controller function | Integral valve responds to the configured setpoint interface |
Configuration and Replacement Boundary
Use the complete 5851S marking together with the unit nameplate, revision, calibrated range, electrical interface, mechanical connections, and host-equipment documentation. A family resemblance or partial code match does not establish interchangeability.
Archived Unit Context
These statements preserve what sellers recorded for individual units without turning listing text into family-wide specifications.
- Brooks Model 5851S BD1DA1ID0BA1B1 Mass Flow Controller AIR 75 SLPM NEW IN BOX B
- Brooks Model 5851S BD1DA1ID0BA1B1 Mass Flow Controller AIR 75 SLPM NEW IN BOX
- Brooks 5851S/BD1KA1AA0AA1B1 Oxygen Controller 0-5 VDC
Documentation Downloads
Local PDF copiesPart Photos
4 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $59.99 to $858.56. Based on 12 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks 5851S Smart Mass Flow Controller