Flow Control
5850EM
Brooks Instrument Metal-Sealed Thermal Mass Flow Controller
About this part
5850EM is a Brooks Instrument metal-sealed thermal mass flow controller platform for high-pressure gas flows and high-purity gas service. It is the metal-sealed counterpart to the 5850E family, adding all-metal seals, very high helium leak integrity, stainless wetted construction, analog command/output I/O, and VCR process connections. Exact gas, full-scale flow, valve seat, pressure rating details, connector package, calibration conditions, and any special options must be verified from the full configured model code and the physical label
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part number5850EM
Product family5850E
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | Metal-sealed analog thermal mass flow controller |
| Series family | 5850EM / 5851EM Series |
| Related platform | Standard 5850E feature set with all-metal seals for improved leak integrity and cleanliness |
Flow
| 5850EM flow range | Any range from 0-3 sccm to 30,000 sccm nitrogen equivalent; lower flows available by factory consultation |
| 5851EM high-flow context | Any full-scale flow from 10 slpm to 100 slpm nitrogen equivalent, up to 200 slpm hydrogen |
| Calibration rule | Gas and full-scale range are configured and calibrated per complete model code |
Performance
| Accuracy | 1% of full scale including linearity at calibration conditions for 5850EM; 1.5% of full scale for ranges above 20 slpm |
| Repeatability | 0.25% of rate |
| Settling time | Less than 3 seconds to within 2% of full scale final value for a 0-100% command step with normally closed valve |
| Temperature sensitivity | Zero less than +/-0.075% full scale per degree C; span less than +/-1.0% full-scale shift over 10 to 50 degrees C |
| Pressure sensitivity | 0.008% per psi nitrogen for 5850EM |
| Mounting attitude sensitivity | Available in any position; 0.5% maximum full-scale deviation after rezeroing |
Ratings
| Maximum operating pressure | 1500 psi maximum; Brooks data sheet notes 500 psi with stainless steel fastener for 5850EM |
| Differential pressure | Valve orifice sized for any pressure drop between 5 and 50 psi; minimum pressure drop depends on gas and range |
| Ambient temperature limits | Operating 40 to 150 degrees F (5 to 65 degrees C); non-operating -13 to 212 degrees F (-25 to 100 degrees C) |
Materials
| Leak integrity | Inboard to outboard 1 x 10^-10 atm cc/sec helium maximum |
| Wetted construction | 316L VAR stainless steel, 316L stainless steel, and high-alloy ferritic stainless steel |
| Seal materials | External and internal seals are Nickel 200 in the series data sheet |
| Valve seat options | 316L stainless steel, Viton, Buna-N, Kalrez, or Teflon depending on configured model code |
| Enhanced internal finish option | Optional enhanced-process 5 microinch Ra average internal finish |
Connections
| Process connection options | Standard 1/4 in tube VCR with 0.250 in bore, integrally welded to body; optional 3/8 in and 1/2 in VCR connections |
Electrical
| Electrical connector | 15-pin D-connector DA-15P for standard 5850EM configuration |
| Command input | 0-5 Vdc voltage command option, 40 kOhm minimum input resistance |
| Output signal | 0-5 Vdc output into 2000 ohms minimum |
| Reference output | 5 V reference output, +/-0.01 Vdc into 2000 ohms minimum |
| Power requirement | +/-15 Vdc supply platform; 3.25 W maximum for normally closed valve or normally open valve below 2.5 slpm, and 10.5 W maximum for normally open valve above 2.5 slpm |
Compliance
| EMC directive | Brooks data sheet lists EMC Directive 89/336/EEC per 61326 |
Applications
| Application domain | High-purity gas delivery, semiconductor process gas control, hazardous gas handling, high-pressure gas flow control, and clean gas-panel service |
Documentation Downloads
Local PDF copiesPart Photos
14 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records21Tracked historical listing records
Historical median price$295.00Based on archived listing records
Recorded price range$75.00 - $584.99Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $95.00 to $500.00. Based on 21 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks 5850EM Mass Flow Controller MFC - Gas: N2 - Flow: 10000 SCCM (10 SLM)
- Brooks 5850EM Mass Flow Controller with Shutoff and actuator valves
- BROOKS 5850EM , 5850EME3HAM4BKA H2 30000 SCCM MASS FLOW CONTROLLER
- Brooks Instrument mass flow controller 5850EM / N2 / 1000 SCCM
- Brooks Instrument emcore mass flow controller 5850EM / N2 / 1000 sccm
- Brooks 5850EM Thermal Mass Flow Controller
Archived listings
Other Part Numbers & Aliases
5850EMBrooks 5850EMBrooks Instrument 5850EMModel 5850EMBrooks Model 5850EM5850EM Series5850EM MFC