Wafer Robotics
151864
Brooks Automation Wafer-Handling Robot
About this part
151864 is a Brooks Automation wafer-handling robot assembly identifier observed in Sonisys stored auction records and external exact-part evidence. available evidence connects this identifier with Brooks wafer-handling, EFEM, ATM, LAM, and Reliance ATR8 contexts, but exact revision, controller pairing, end effector, harnessing, firmware, serial number, and host-tool compatibility must be verified from the physical unit and OEM documentation
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part identifier | 151864 |
| Observed manufacturer | Brooks / Brooks Automation |
| Observed device type | Wafer-handling robot / EFEM robot assembly |
| Application domain | Semiconductor wafer handling, EFEM/interface automation, and equipment service parts |
| Observed system context | Exact-part evidence and stored auction records connect this identifier with LAM, ATM robot, and Reliance ATR8 wording; these are observed contexts, not universal compatibility claims |
| Configured-unit rule | Revision, robot configuration, controller pairing, end effector, harnessing, firmware, serial number, and host-tool compatibility vary by physical unit and installed system |
Part Photos
10 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $31,999.60 to $43,000.00. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS 151864 LAM Reliance ATM Robot_ATR8_Brooks Automation with end effector
- Brooks Wafer Handling ATM Robot 151864 (Working)
- Brooks LAM Wafer Handling ATM Robot 151864 (Working)
- BROOKS 151864 WAFER HANDLING TRANSFER ATM ROBOT