Wafer Robotics

139164R

Brooks Automation Robot and Controller Assembly

About this part

139164R is an archived Brooks Automation identifier for a configured 300 mm wafer-handling robot/controller assembly. The record preserves the exact identifier and observed assembly context; controller firmware, robot geometry, axis configuration, cables, end effectors, and tool integration must be matched to the complete system configuration

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Photos (5)Listing history

Brooks Automation 139164R configured 300 mm wafer-handling robot/controller assembly auction image

Archived part photo · View gallery

Key Facts

ManufacturerBrooks Automation

Part number139164R

Product familyConfiguration-specific

Device typeWafer Handling Assembly

Configuration statusConfiguration varies

Application classWafer automation

CategoryWafer Robotics

Specifications

Identification

Manufacturer	Brooks Automation
Equipment class	Configured 300 mm wafer-handling robot/controller assembly

Integration

Configuration dependency

System firmware, axis configuration, cables, interlocks, and mechanism parameters vary by installation

Replacement

Compatibility rule

Verify full assembly number, revision, controller/robot pairing, connectors, firmware, and tool bill of materials

System Compatibility Boundary

A matching family name is not enough for substitution. Confirm the exact assembly and revision plus the controller, mechanism, cabling, safety interlocks, and software configuration.

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$18,999.00Based on archived listing records

Recorded price range$18,999.00 - $18,999.00Low to high recorded listing price

Local documents0PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $18,999.00 to $18,999.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

BROOKS ROBOT 139164R Controller 108199 300mm Backbone

Archived listings

Other Part Numbers & Aliases

139164RBrooks Automation 139164RBrooks 139164R