Wafer Robotics
107B
Brooks Automation / PRI Atmospheric Single-Arm Wafer Robot Configuration
About this part
107B is the shared configuration portion of Brooks Automation atmospheric single-arm robot model numbers such as ATM-107B and ABM-107B. The manufacturer configuration matrix defines the 107b base as a 7.1-inch Z-stroke robot with a 7.2b-inch wide arm link. The ATM prefix specifies top mounting and ABM specifies bottom mounting; vacuum channels, cassette mapping, CE marking, wet-process construction, and other integration details are selected by additional suffixes. A bare 107B identifier therefore does not define one complete configured unit
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer model forms | ATM-107b or ABM-107b; uppercase 107B is commonly used on equipment and secondary records |
| Arm-link configuration | 7.2b in; “b” denotes the wide-arm version |
| Z-axis stroke | 7.1 in |
| Mounting arrangement | Top mount with ATM prefix; bottom mount with ABM prefix |
| Motion axes | Theta, radial, and Z |
| Wafer-size range | 75 to 300 mm (3 to 12 in) |
| Repeatability | ±25 µm at 3 sigma |
| Cleanroom compatibility | Class 1 |
| Wafer retention | Vacuum-held end effector |
| Operating temperature | 15 to 32.5 °C (59 to 89 °F) |
| Storage temperature | −20 to 40 °C (−4 to 104 °F) |
| Relative humidity | 10% to 80%, non-condensing |
| Maximum operating altitude | 1,000 m above sea level |
| Recommended vacuum source | 25 in Hg at greater than 1 SCFM free flow |
| Host interface | RS-232C ASCII through a DB25 connector at 9,600 baud |
| AC input range | 92 to 260 VAC, 47 to 63 Hz |
| Nominal current draw | 5 A at 100/120 VAC or 2.5 A at 220/240 VAC |
Model-Code Decoding
The Brooks manual defines the base robot and standard option codes. Codes beyond those listed below require the exact unit label, configuration drawing, and serial-specific records.
| Code element | Manufacturer meaning | Configuration consequence |
|---|---|---|
| ATM | Atmospheric Top Mount | Robot mounts through the host equipment base plate. |
| ABM | Atmospheric Bottom Mount | Robot mounts on the host equipment base plate. |
| 107b | 7.1-in Z stroke with 7.2b-in arm links | The lowercase “b” in the manufacturer matrix denotes a wide arm. |
| -1 | Single vacuum | One vacuum channel. |
| -2 | Dual vacuum | Two vacuum channels. |
| -S | Cassette mapper/scanner | Adds the wafer-mapping option. |
| -F | Flipper | Adds a flipper option. |
| -CE | CE mark | Identifies a CE-marked configuration. |
| -WET | Wet-process configuration | Wet-process option; the manual notes 7- or 10-in Z travel availability for this option. |
| Other suffixes, including S293 | Not decoded in the atmospheric robot manual | Verify from the unit label, Brooks configuration drawing, and serial-specific parameter records. |
Controller and Replacement Compatibility
The robot is one component of a system built around a Brooks Smart Controller. Robot and controller substitutions require the files belonging to the exact robot rather than model-number matching alone.
Integration and Safety Boundary
The atmospheric robot is intended for integration into host semiconductor equipment.
- The robot system is not intended for stand-alone use; the host tool supplies operating instructions and provides the required safety architecture.
- The user system must provide emergency-off control, interlocks, grounding, and suitable overcurrent protection.
- Automatic motion is possible whenever power is applied, and some moving mechanisms have no obstruction sensors.
- Alignment must be completed after installation, service, robot replacement, or relevant controller replacement to prevent positioning errors and wafer damage.
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $99.99 to $19,000.00. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- PRI Brooks ABM 107B 911053-019 robot (calibrated)