Flow Control
02-0624R-031
Brooks Instrument Model 5964 N₂ 10 SLPM Mass Flow Controller
About this part
02-0624R-031 identifies a configured Brooks Instrument Model 5964 thermal mass flow controller for high-purity gas delivery. The recorded unit is configured for nitrogen with a 10 SLPM full-scale range and carries configured model code 5964C2BAA25KA. Brooks’ manufacturer documentation establishes the Model 5964 family specifications; connector, valve-seat, signal and process-connection options should be verified from the individual instrument label before installation
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Canonical part identifier | 02-0624R-031 |
| Manufacturer | Brooks Instrument |
| Model family | 5964 |
| Measurement principle | Thermal mass flow |
| Media | Gas |
| Available full-scale ranges | 3 to 30,000 sccm nitrogen equivalent; lower ranges available by factory consultation |
| Control range | 2–100% with an elastomeric valve seat; 3–100% with a metal or Teflon valve seat |
| Accuracy | 1% of full scale including linearity at calibration conditions; 1.5% of full scale above 20 SLPM |
| Repeatability | 0.25% of rate |
| Enhanced-response settling time | Less than 1 second to within 2% of full scale after a 0–100% command step, with the enhanced-response PCB and normally closed valve |
| Maximum operating pressure | 1,500 psi (10.342 MPa); limited to 150 psi for enhanced response and 500 psi with the stainless-steel-fastener option |
| Required differential pressure | Valve orifice configurable for a 5–50 psi pressure drop; minimum depends on gas and flow range |
| Operating ambient temperature | 5–65 °C (40–150 °F) |
| Non-operating temperature | −25–100 °C (−13–212 °F) |
| Leak integrity | 1 × 10⁻¹⁰ atm·cc/s helium maximum, inboard to outboard |
| Construction materials | 316L VAR, 316L and high-alloy ferritic stainless steel; nickel internal and external seals |
| Model 5964 surface finish | 7 Ra, electropolished |
| Process connections | 1/4-inch tube VCR, downport C-seal or downport W-seal options |
| Electrical connection | Card-edge or 15-pin DA-15P D-connector options |
| Analog command options | 0–5 VDC or 4–20 mA DC |
| Analog output options | 0–5 VDC; current version jumper-selectable for 4–20 mA or 0–20 mA |
Identifier and configuration boundary
The canonical part identifier and configured Brooks model code should be retained as distinct label identifiers. Brooks’ family manual does not decode 5964C2BAA25KA or associate it with 02-0624R-031.
Installation and service notes
Brooks’ Model 5964/5850EM manual supplies the following safety and service guidance.
- The integral control valve provides precision regulation but is not a positive shutoff device; install a separate shutoff valve where positive isolation is required.
- Install an upstream filter to protect the sensor and control valve. Brooks recommends a 15-micron filter for flow ranges from 10 to 30 SLPM.
- Apply power and allow approximately 45 minutes for temperature stabilization before normal operation.
- Calibration and internal adjustment should be performed only by trained, qualified service personnel using a precision flow standard.
- Before disconnecting a controller exposed to toxic, pyrophoric, flammable or corrosive gas, purge it thoroughly with a dry inert gas such as nitrogen.
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $77.00 to $77.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS MASS FLOW CONTROLLER 5964 GAS: N2 10 SLPM, 02-0624R-031, 5964C2BAA25KA