Load Ports
013096-762-20
Brooks Automation FixLoad 6M 300 mm FOUP Load-Port Assembly
About this part
Brooks Automation 013096-762-20 is a configured assembly identifier for a FixLoad 6M load-port module used to present and open 300 mm FOUP carriers at semiconductor equipment front-end interfaces. Brooks documentation identifies the FixLoad 6M as a 300 mm load port, but does not publicly decode the -762-20 configuration. Installed mapping, carrier-identification, E84, and other interface options must therefore be established from the unit nameplate, configuration records, or assembly drawings
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part number | 013096-762-20 |
| Product family | FixLoad 6M |
| Equipment class | FOUP load-port module / assembly |
| Nominal wafer format | 300 mm; FixLoad 6M family specification |
| System location | Atmospheric equipment front-end interface for presenting and opening wafer carriers |
| Wafer mapping | Optional through-beam mapping is documented for FixLoad 6M; installation on 013096-762-20 is not established |
| Automated material handling interface | Optional SEMI E84 support for AGV and OHT applications is documented at the load-port-module level; installation on 013096-762-20 is not established |
| Detection when equipped with load-port mapping | Present, missing, cross-slotted, and double-slotted wafers; family-level capability |
Configuration and option boundary
The complete Brooks assembly number must be matched when evaluating replacement compatibility.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $7,000.00 to $7,000.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- dY†Brooks Automation Fixload 6M Loadport Assembly P/N 013096-762-20 1set