Load Ports
013096-057-20
Brooks Automation FixLoad 6 V6M 300 mm FOUP Load Port
About this part
Brooks Automation part 013096-057-20 is a configured FixLoad 6 V6M load-port assembly for 300 mm semiconductor-wafer FOUP handling. Brooks documentation identifies the FixLoad 6M family as a 300 mm FOUP load port used at an atmospheric equipment front end. Carrier mapping and E84 automation interfaces were available in family-level configurations, but the installed options on this exact part number require physical or configuration-record verification
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part number | 013096-057-20 |
| Exact-part designation | FixLoad 6 V6M |
| Product family | FixLoad 6M |
| Equipment type | FOUP load-port module |
| Wafer size | 300 mm (12 in) |
| Carrier format | 300 mm front-opening unified pod (FOUP) |
| Operating context | Atmospheric semiconductor equipment front-end material handling |
| Carrier mapping | Available on the FixLoad V6/6M family; installation on part 013096-057-20 is not established by an official option-code record |
| E84 automation interface | Available in Brooks load-port system configurations for AGV or OHT integration; installation on part 013096-057-20 is not established |
Configuration and Family Boundary
Brooks used both FixLoad V6 and FixLoad 6M naming in product and system literature. Exact-part records consistently add the V6M designation to 013096-057-20, but no public Brooks option-code legend was identified for decoding that designation.
| Item | Documented relationship | Applicability |
|---|---|---|
| Exact identifier | 013096-057-20 | Exact configured assembly |
| Observed model designation | FixLoad 6 V6M | Exact-part equipment records |
| Official family naming | FixLoad V6 and FixLoad 6M | Manufacturer-issued family sources |
| FixMAP carrier mapping | Brooks described FixMAP as an option for FixLoad V6; later Brooks documentation states that a FixLoad 6M with load-port mapping can identify present, missing, cross-slotted, and double-slotted wafers | Family/configuration level; installed status on 013096-057-20 remains unverified |
| E84 interface | Optional devices support AGV and OHT carrier-transfer systems | Family/system level; installed status on 013096-057-20 remains unverified |
| Mechanical integration | The FixLoad V6 product description identifies quick-release mounting and multidirectional tool adjustment | FixLoad V6 family characteristic |
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $14,500.00 to $14,500.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation Fixload 6 V6M 013096-057-20 300mm, Missing Piece 1, 6
