Load Ports
013096-021-22
Brooks Automation FixLoad 6M 300 mm FOUP Load-Port Assembly
About this part
Brooks Automation 013096-021-22 identifies a configured FixLoad 6M load-port assembly for 300 mm FOUP wafer handling. Brooks documentation establishes the FixLoad 6M as a 300 mm load-port family, but publicly available manufacturer material does not decode the -021-22 configuration suffix. Installed mapping, E84, communications, and other options must therefore be confirmed from the unit label, connectors, and associated controller configuration
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation, Inc |
| Part identifier | 013096-021-22 |
| Product family | FixLoad 6M |
| Equipment class | Semiconductor equipment load-port module |
| Wafer size | 300 mm |
| Carrier format | FOUP (front-opening unified pod) |
| Material-handling location | Atmospheric equipment front end |
| Installed options | Not decoded for suffix -021-22; wafer mapping, E84 interface, and communications topology are configuration-dependent |
Configuration boundary
The full identifier 013096-021-22 should be retained as the configured assembly number. Public Brooks documents establish the FixLoad 6M family and its system interfaces but do not provide a suffix-code table for -021-22. Family options must not be represented as installed features of this unit without examination of its nameplate, harnesses, mapping hardware, and controller setup.
FixLoad 6M integration context
Brooks manuals document capabilities and interfaces available in systems using FixLoad 6M modules. These are family-level integration facts, not confirmation of the options installed on 013096-021-22.
| Topic | Family-level documentation | Exact-unit boundary |
|---|---|---|
| Wafer mapping | FixLoad 6M configurations were available with load-port mapping. Brooks describes a load-port-mounted through-beam mapper capable of detecting present, missing, cross-slotted, and double-slotted wafers. | Mapper presence on 013096-021-22 is not verified. |
| Robot-controller link | Brooks MagnaTran LEAP software defines a FIXLOAD link type for a FixLoad 6M load-port module and documents a DNETSGW4 serial-gateway connection using SI30 through SI39. | The controller and connection topology used with 013096-021-22 are not verified. |
| Factory automation interface | Brooks M2 atmospheric-front-end documentation describes E84 as an optional load-port interface for AGV or OHT handshaking. | E84 hardware on 013096-021-22 is not verified. |
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $7,000.00 to $7,000.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- dY†Brooks Automation Fixload 6M Loadport Assembly P/N 013096-021-22 1set