Load Ports
003-9010-19
Brooks Automation VCE4 Vacuum Cassette Elevator
About this part
Brooks Automation 003-9010-19 is a VCE4 Vacuum Cassette Elevator for semiconductor wafer handling. Exact-part equipment and repair records identify the assembly as a vacuum cassette elevator and associate it with the VCE4 platform. The stored configuration is described as lip-seal type. Cassette format, wafer size, travel, controls, utilities, and host-tool compatibility must be confirmed from the exact unit
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part number | 003-9010-19 |
| Manufacturer / brand | Brooks Automation / legacy PRI-Equipe |
| Equipment type | Vacuum Cassette Elevator |
| Platform association | VCE4 |
| Seal description | Lip-seal type |
Configuration and Replacement Boundary
Match the complete part number, VCE generation, cassette and wafer format, travel, vacuum interface, seal, sensors, drive, connectors, controller, and host-tool bill of materials before substitution.
Part Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $7,223.00 to $9,007.00. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Vacuum Cassette Elevator 003-9010-19(LIP SEAL TYPE)