Wafer Robotics
003-1600-32
Brooks Automation MagnaTran 7 MAG7 Wafer Transfer Robot
About this part
003-1600-32 is a Brooks Automation MagnaTran 7 / MAG7 wafer transfer robot identifier used in semiconductor vacuum-tool automation. Stored auction records and external surplus references identify it as a MagnaTran 7 wafer transfer robot, with observed Canon, Novellus, LAM, Aviza, 200 mm, 300 mm, arm, and backbone contexts. Exact arm set, backbone, controller, wafer size, and host-tool compatibility must be verified from the physical robot and installed tool
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Device type | MagnaTran 7 / MAG7 wafer transfer robot |
| Part identifier | 003-1600-32 |
| Manufacturer family | Brooks Automation MagnaTran vacuum-robot wafer-handling automation |
| Application domain | Vacuum wafer transfer in semiconductor cluster tools and process-tool automation |
| Observed tool/OEM context | Stored and external references associate 003-1600-32 with Canon, Novellus, LAM, Aviza, and other semiconductor tool contexts |
| Observed wafer-size context | External surplus references describe 200 mm or 300 mm MAG7 contexts; other references specifically show 300 mm backbone or arm examples |
| Observed arm/backbone context | External surplus evidence includes examples with 300 mm backbone and examples paired with arm set 002-0016-34 |
| Replacement checks | Confirm arm set, backbone, end effector, wafer size, controller compatibility, cable set, firmware, mapping hardware, and host-tool requirements before replacement |
Part Photos
2 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $6,181.78 to $14,820.98. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 003-1600-32 / MAG7 ROBOT FOR CANON / BROOKS AUTOMATION
- BROOKS MAGNATRAN 7 WAFER TRANSFER ROBOT 003-1600-32 (0704-11174)
- Brooks Automation MagnaTran 7 MAG7 003-1600-32