Wafer Robotics
002-9500-32
Brooks Automation EFEM Wafer-Handling System
About this part
Brooks Automation 002-9500-32 identifies an Equipment Front-End Module wafer-handling system. An exact equipment record documents a configured EFEM containing Brooks orienter, atmospheric robot, robot controller, load ports, and TEC3000 automation control hardware. The listed subassemblies describe that observed system and are not universal specifications for every 002-9500-32 unit
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Part number | 002-9500-32 |
| Manufacturer / brand | Brooks Automation |
| Equipment type | Equipment Front-End Module wafer-handling system |
Configured-System Boundary
Confirm frame dimensions, load-port count and type, wafer format, robot and aligner models, controller hardware, safety I/O, communications, utilities, software, and process-tool interface from the exact system inventory. A shared top-level number does not prove identical subassembly population.
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerRecorded price context is shown when available. Based on 0 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- EFEM Brooks Wafer Handling system