Wafer Robotics
002-9401-01
Brooks Automation Series 8 Robot Controller
About this part
Brooks Automation 002-9401-01 is a Series 8 robot controller for semiconductor wafer-handling equipment. A photographed exact-number unit has DeviceNet, SIO-1, SIO-2, CDM, robot, and traverser interfaces. System compatibility depends on the controller hardware population, firmware and application settings, cables, and host-tool configuration
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation; legacy units may carry Brooks-PRI branding |
| Product series | Series 8 |
| Component type | Robot controller |
| Equipment class | Semiconductor wafer-handling automation |
| Input rating on photographed 002-9401-01 unit | 100–240 VAC, 50/60 Hz, 8 A |
| Communication and service interfaces on photographed unit | DeviceNet, SIO-1, SIO-2, and CDM |
| Motion-system connections on photographed unit | Robot and traverser control connections |
| Country of origin on photographed unit | USA |
Configuration and substitution boundary
Series 8 is a controller family containing multiple distinct assembly numbers. Other Series 8 identifiers—including 002-9400 variants, 104760, 105946, 105947, and 119204—are not aliases for 002-9401-01. Before substitution, match the complete part number, installed cards and connectors, firmware and robot application files, motor and encoder cabling, DeviceNet setup, and host-tool interface.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $340.37 to $13,478.00. Based on 4 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation 002-9401-01 300mm Robot Controller Incomplete As-Is Spare