Wafer Robotics
002-9400-20
Brooks Automation Series 8 Robot Controller
About this part
Brooks Automation 002-9400-20 is a Series 8 robot controller associated with semiconductor wafer-handling equipment. Observed examples have appeared both as standalone controllers and in a lot containing ATR-8 wafer-transfer robots and aligners; that lot context does not establish a universal robot pairing. Brooks Series 8 documentation provides family-level software and communication context, but exact electrical ratings, connector configuration, firmware, and robot compatibility were not established for suffix 002-9400-20
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part number | 002-9400-20 |
| Product series | Series 8 |
| Component type | Robot controller |
Series 8 software and communication context
Brooks Remote Setup Utility V1.6 is documented as a Windows-based toolbox for Series 8 Controllers. These statements apply to the controller family and do not establish the installed software or enabled interfaces of every 002-9400-20 unit.
| Manual item | Documented family-level value | Exact-part boundary |
|---|---|---|
| Utility | Remote Setup Utility V1.6 | Installed utility and firmware for 002-9400-20 not established |
| Supported software listed by the RSU manual | Mag 7 V2.2; WAVE V1.8; WAVE II V1.2P and V2.0A | This is the RSU manual's support list, not a confirmed configuration of 002-9400-20 |
| Connection procedures | Serial port and Ethernet | Port population and availability must be verified on the configured unit |
Part Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $2,000.00 to $2,000.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation Series 8 Robot Controller PN: 002-9400-20