002-9400-04 is a Brooks Automation / Brooks PRI Automation Series 8 wafer robot controller part number identified in Sonisys auction history and semiconductor-surplus records. available evidence repeatedly describes it as a robot controller, Series 8 robot controller, or Series 8 wafer robot controller. Individual listings associate the controller with FEI CLM-3D, KLA-Tencor eS20XP, Brooks 017-0950-01 200 mm wafer handling robot, and controller repair contexts, but no verified official exact Brooks Automation datasheet or service manual is currently available Sonisys preserves the identification, pricing, and image archive while avoiding unsupported claims about power input, bus protocol, robot compatibility, firmware, I/O mapping, or repair interchangeability
Configurations vary. Verify the exact unit before choosing a replacement.
Series 8 wafer robot controller / robot controller
Brand lineage
Brooks Automation and Brooks / PRI Automation names appear in stored and marketplace evidence
Observed marketplace names
Series 8 wafer robot controller, Series 8 robot controller, wafer transfer robot controller, and robot controller
Function
Likely machine function
Controller module for compatible Brooks Automation wafer-handling robot systems
Observed associations
FEI CLM-3D context
Stored and listing evidence includes Brooks Automation 002-9400-04 Robot Controller Series 8 FEI CLM-3D wording
KLA-Tencor eS20XP context
Surplus evidence identifies one Brooks Automation 002-9400-04 Robot Controller Series 8 unit with KLA-Tencor eS20XP remark
017-0950-01 robot context
Available evidence includes Brooks Automation 017-0950-01 200 mm wafer handling robot listings with 002-9400-04 controller wording
Related Series 8 controller identifiers
Inventory pages place 002-9400-04 near related Brooks Series 8 controller identifiers including 002-9400-20, 002-9401-01, 104760, 105946, 105947, 108549, 119215, 129973, 146828, 146832, and 171424
Repair-listing context
Stored auction evidence includes a repair listing mentioning 002-9400-04 together with 002-9400-05, 002-9400-07, 002-9401-01, and 003-1600-25
PCB-board context
Stored auction evidence includes one Brooks 002-9400-04 robot controller PCB board assembly listing with 002-7988-01 Rev. A2 wording
Configuration
Configured-unit rule
Robot model, installed firmware, controller hardware revision, card set, cable set, power input, fieldbus/interface configuration, and tool compatibility vary by the physical controller and installed system
Compatibility
Tool-fit caution
Do not assume compatibility with FEI CLM-3D, KLA-Tencor eS20XP, Brooks 017-0950-01, Series 8 robots, pre-aligners, teach pendants, or another tool platform from the part number alone
Documentation
Documentation status
No exact official Brooks Automation datasheet, service manual, wiring guide, firmware guide, I/O map, or controller compatibility matrix for 002-9400-04 is currently available in the Sonisys document archive
Unsupported details avoided
No voltage input, current rating, connector pinout, motor-axis count, I/O assignment, communication protocol, firmware version, or robot model matrix is claimed without exact documentation
Condition
Condition varies
Stored and listing evidence includes used, working, used-working, for-parts/not-working, repair-service, and controller-board condition contexts
Applications
Application domain
Semiconductor wafer handling robotics, Brooks Automation Series 8 robot service, wafer transfer robot control, and legacy tool maintenance
Part Photos
5 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records12Tracked historical listing records
Historical median price$656.06Based on archived listing records
Recorded price range$99.99 - $2,000.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $443.99 to $1,654.08. Based on 12 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks Automation Series 8 Wafer Robot Controller PN: 002-9400-04
