Load Ports

002-9358-01

Brooks Automation Load Port Module

About this part

Brooks Automation 002-9358-01 is a semiconductor load port module. Surviving Revision 5 units have been identified with 24 VDC power, a SEMI E84-0699 carrier-handoff interface, and RS-232 communications. Those electrical and interface details describe the observed Revision 5 configuration and should not be assumed for other revisions without unit-label or manual verification

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Photos (0)Listing history

No archived photo available

Key Facts

ManufacturerBrooks Automation

Part number002-9358-01

Product familyConfiguration-specific

Device typeLoad Port

Configuration statusConfiguration varies

Application classSemiconductor/high-purity gas delivery

CategoryLoad Ports

Specifications

Identification

Manufacturer	Brooks Automation
Manufacturer part number	002-9358-01

Product classification

Component type

Semiconductor load port module

SEMI E84 Interface Context

The E84-0699 marking on observed Revision 5 units identifies an implementation associated with the first published revision of the SEMI E84 enhanced carrier-handoff parallel I/O standard.

Interface purposeCoordinates automated carrier handoff between active transport equipment and passive semiconductor processing equipment.

Observed standard revisionSEMI E84-0699, identified by SEMI as the standard's first published revision.

Applicability boundaryVerified only as an observed Revision 5 unit marking; it is not established as a universal feature of every 002-9358-01 revision.

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$73.29Based on archived listing records

Recorded price range$73.29 - $73.29Low to high recorded listing price

Local documents0PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $73.29 to $73.29. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

Brooks Automation 002-9358-01 Load Port Module 24V DC E84-0699 & RS-232

Archived listings

Other Part Numbers & Aliases

002-9358-01Brooks 002-9358-01Brooks Automation 002-9358-01