Vacuum and Cryogenics

002-8500-110

Brooks Automation Transfer Chamber

About this part

Brooks Automation 002-8500-110 is a transfer chamber assembly for semiconductor automation equipment. The archived unit carries a readable Brooks Automation nameplate with exact Part No. 002-8500-110 and Made in USA marking. Port geometry, internal robotics, seals, utilities, process compatibility, and host-tool fit are configuration-specific and must be verified against the physical chamber and equipment bill of materials

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Automation
Part number002-8500-110
Product familyConfiguration-specific
Device typeSemiconductor automation transfer chamber
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryVacuum and Cryogenics

Specifications

Identification
Part number002-8500-110
ManufacturerBrooks Automation
Equipment typeTransfer chamber
Observed exact unit
Country markingMade in USA

Installation and Fit Boundary

Match the complete part number, chamber port pattern, orientation, sealing interfaces, internal hardware, utilities, and host-tool bill of materials. The exact label establishes identity but not universal dimensional, vacuum, or compatibility specifications.

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$2,500.89Based on archived listing records
Recorded price range$2,500.89 - $2,500.89Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $2,500.89 to $2,500.89. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • 002-8500-110 / TRANSFER CHAMBER / BROOKS AUTOMATION

Archived listings

Other Part Numbers & Aliases

002-8500-110Brooks 002-8500-110Brooks Automation 002-8500-110Brooks 002-8500-110 transfer chamber