Wafer Robotics
002-7391-17
Brooks Automation Wafer Aligner / Pre-Aligner
About this part
Brooks Automation 002-7391-17 is a semiconductor wafer aligner/pre-aligner assembly used to center a wafer and orient its flat or notch before robotic transfer to a process or measurement station. The complete part number identifies the assembly but does not by itself specify wafer diameter, axis count, loading geometry, controller compatibility, or regulatory options. Match those configuration details to the unit label and target tool before installation
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| OEM part number | 002-7391-17 |
| Equipment type | Semiconductor wafer aligner / pre-aligner |
| Primary function | Centers a wafer and rotates its flat or notch to the required orientation before robotic handling |
| Exact-unit boundary | Wafer size, axis count, chuck-versus-pin loading, end-effector geometry, controller, and compliance options are not established by the 002-7391-17 identifier alone |
Operating Principle
Brooks atmospheric pre-aligners rotate the wafer between an LED source and CCD sensor array. The controller analyzes the wafer-edge trace to calculate eccentricity and locate the flat or notch, then centers the wafer and rotates the fiducial to the programmed position. Three-axis versions perform centering internally; single-axis versions use the associated robot for radial and vertical correction. Confirm the axis arrangement of 002-7391-17 from its label and controller configuration.
What Does 002-7391-17 Mean?
002-7391-17 is a Brooks assembly part number, not a published customer-configurable model code. Use the complete identifier when matching a replacement.
| Segment | Field | Interpretation |
|---|---|---|
| 002 | Brooks part-number prefix | Internal Brooks identifier prefix; it does not define a published aligner option. |
| 7391 | Wafer-aligner assembly group | Identifies the Brooks wafer aligner/pre-aligner assembly group. |
| 17 | Assembly variant | Distinguishes this assembly from other 002-7391 variants such as -07 and -08. It is not a revision or proof of interchangeability. |
Documented PRE Family Comparison
Brooks documented the following PRE family variants. Use this table for family comparison only; 002-7391-17 is not assigned to a specific PRE model by its assembly number.
| Model | Axes | Documented wafer sizes | Load type | Associated end effector |
|---|---|---|---|---|
| PRE-050 | 1 | 76–200 mm (3–8 in) | Chuck | Horseshoe |
| PRE-200 | 3 | 76–200 mm (3–8 in) | Chuck | Horseshoe |
| PRE-201 | 3 | 76–200 mm (3–8 in) | Pin | Blade |
| PRE-300 | 3 | 200 and 300 mm; optional 150 mm | Chuck | Horseshoe |
| PRE-301 | 3 | 200 and 300 mm; optional 150 mm | Pin | Blade |
| PRE-350 | 1 | 200 and 300 mm; optional 150 mm | Chuck | Horseshoe |
Legacy Family Installation Reference
These are manufacturer-documented requirements for the covered atmospheric pre-aligner family. Confirm applicability against the exact unit and controller before installation.
Configuration and Safety Checks
Installation and replacement require exact configuration verification.
- Confirm the labeled wafer-size range and whether the unit is chuck-loading or pin-loading.
- Confirm the required Brooks controller, signal cable, data cable, and power cable before energizing the assembly.
- Confirm CE or SEMI S2 applicability from the unit markings; the family manual limits its regulatory statements to appropriately marked configurations.
- Provide a system-level emergency-off circuit. The documented pre-aligner family does not include its own EMO device.
- Follow lockout/tagout procedures during service. The documented moving mechanisms do not have obstruction sensors.
Part Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,677.17 to $1,964.13. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation 002-7391-17 Pre-Aligner
- Brooks Automation Wafer Aligner (Part Number: 002-7391-17)