Load Ports
002-7349-02
Brooks Automation VCE6 MX Rectangular Welded Chamber
About this part
Brooks Automation 002-7349-02 is a rectangular welded chamber for MX-system VCE6 Vacuum Cassette Elevator equipment. Canon Anelva's official discontinued-parts record identifies the assembly as CHAMBER, WELDED VCE6, MX, RECTANGULAR and lists 002-7349-02 Rev. E for MX-400/VCE6 use. Revision, flange arrangement, ports, seals, and host-tool fit must match the installed assembly
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part number | 002-7349-02 |
| Manufacturer / brand | Yaskawa Brooks Automation / Brooks Automation |
| Component type | Rectangular welded VCE6 chamber |
| Equipment context | MX-400 / VCE6 |
| Revision listed | Rev. E |
Revision and Installation Checks
Match the complete 002-7349-02 identifier, revision, chamber orientation, flange and port pattern, sealing surfaces, door interface, and MX/VCE6 bill of materials. The official record does not establish interchangeability with another VCE chamber revision.
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $2,500.89 to $2,500.89. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 16800-0011 / LOAD LOCK, 002-7349-02 MICROSYSTEMS IONSCAN 800 / BROOKS AUTOMATION