Load Ports
002-7200-31
Brooks Automation Wafer Load Port
About this part
002-7200-31 is a Brooks Automation service-part identifier supported by exact-part surplus evidence as a wafer load port. auction evidence also shows an observed 300 mm unit associated with KLA-Tencor WaferSight equipment, but that configuration is not treated as a universal specification. No verified official exact-part datasheet, manual, drawing, or configuration PDF is currently available, so wafer size, carrier type, interface, controller, orientation, options, and host-tool compatibility must be verified from the physical unit label and OEM documentation
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part identifier | 002-7200-31 |
| Observed manufacturer | Brooks Automation |
| Observed exact-part description | Exact-part surplus evidence identifies 002-7200-31 as a Brooks Automation wafer load port |
| Application domain | Semiconductor wafer-carrier loading and equipment automation service context |
| Configured-unit rule | Wafer size, carrier type, mechanical orientation, communication interface, controller, sensors, options, and host-tool compatibility can vary by physical unit and installed system |
| Verification boundary | Do not infer interchangeability with sibling 002-7200 load-port part numbers without matching the complete part number, labels, connector layout, physical configuration, and OEM service requirement |
Part Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,501.25 to $1,501.25. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation 002-7200-31 300mm Load Port KLA-Tencor WaferSight 1 Working