Wafer Robotics

002-7090-10

Brooks Automation AquaTran 7 Wafer Transfer Robot

About this part

002-7090-10 is a Brooks Automation wafer-handling robot identifier. Stored Sonisys evidence identifies it as a Brooks semiconductor wafer handling robot and as a Novellus 63-303438-00 robot assembly with Brooks 002-7090-10 context, while inventory evidence identifies 002-7090-10 as an AquaTran 7 wafer transfer robot / ATRY configuration. Treat Novellus and assembly identifiers as configuration context, not interchangeable part-number aliases

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Automation
Part number002-7090-10
Product familyConfiguration-specific
Device typeWafer Transfer Robot
Configuration statusConfiguration varies
Application classWafer automation
CategoryWafer Robotics

Specifications

Identification
Device typeAquaTran 7 wafer transfer robot / Novellus robot assembly
Manufacturer familyBrooks Automation / PRI Automation wafer-handling robotics
Observed exact part number002-7090-10
Robot family
Observed family wordingAquaTran 7 and ATRY wording appears in SemiStar inventory evidence for 002-7090-10
Robot package
Observed wafer-handling contextStored Sonisys evidence identifies 002-7090-10 as a semiconductor wafer handling robot
Observed Novellus assembly contextStored Sonisys and inventory evidence identify Novellus 63-303438-00 Robot Assy, DU EE, NO EE, 200, with Brooks 002-7090-10 context
Observed related identifiers184421 appears in stored Sonisys title evidence, while 424263 appears in inventory evidence for the Novellus robot assembly context
Function
Primary roleSemiconductor wafer transfer or wafer handling in Brooks Automation / Novellus tool automation contexts
Configuration
Configured-unit ruleRobot assembly completeness, dual end-effector configuration, controller, cable set, wafer size, mapping hardware, firmware, and host-tool compatibility can vary by physical unit
Applications
Application domainSemiconductor wafer handling, wafer transfer, Novellus tool service context, and Brooks/PRI robot spare-part identification
Compatibility
Tool-fit cautionDo not assume compatibility from AquaTran 7, ATRY, Novellus, or 63-303438-00 wording alone; match the full part number, robot assembly label, controller, cables, end-effector setup, calibration, and tool requirement
Documents
Documentation statusNo official exact Brooks Automation PDF for 002-7090-10 is currently available in the Sonisys document archive

Part Photos

4 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$14,750.00Based on archived listing records
Recorded price range$5,000.00 - $24,500.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $6,950.00 to $22,550.00. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Automation Part No. 002-7090-10 Semiconductor Wafer Handling Robot
  • Novellus 63-303438-00 Robot Assy, DU EE, NO EE, 200, Brooks 002-7090-10, 184421

Archived listings

Other Part Numbers & Aliases

002-7090-10Brooks 002-7090-10Brooks Automation 002-7090-10Brooks Automation Part No. 002-7090-10 Semiconductor Wafer Handling RobotBrooks Automation 002-7090-10 AquaTran 7 Wafer Transfer RobotBrooks Automation 002-7090-10 AquaTran 7 RobotBrooks Automation 002-7090-10 ATRY Wafer Transfer RobotNovellus 63-303438-00 Robot Assy DU EE NO EE 200 Brooks 002-7090-10