Load Ports
002-6878-06
Brooks Automation Load Port PCB / Motherboard
About this part
002-6878-06 is a Brooks Automation load-port PCB / motherboard part number observed in Sonisys auction history and multiple surplus listings. Exact listing evidence identifies it as a Brooks Automation board for wafer load port service, a Fixload PCB, and an Express Load Port motherboard. Observed listing contexts include Rev A1, Rev A3, 300 mm wafer/load-port wording, and use inside or alongside Brooks Fixload / SMIF wafer load port assemblies
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part identifier | 002-6878-06 |
| Device type | Load port PCB / motherboard |
| Brand family | Brooks Automation semiconductor interface automation and load-port equipment |
| Observed revision markings | Stored and listings include Rev A1 and Rev A3 contexts |
| Observed assembly context | Listings describe the part as an Express Load Port mother board, Fixload PCB, board for wafer load port, and circuit board within a Brooks 002-7800-07 Fixload SMIF wafer load port listing |
| Observed wafer/load-port context | Stored listing title includes 300mm wafer wording, while other listings associate the board with wafer load port and SMIF load port equipment |
| Related assemblies | Observed related assembly references include Brooks 002-7800-07 Fixload SMIF wafer load port, Brooks 002-7200-21 PCB/load-port context, and KLA 750-614044-000 01 PCB context |
| Compatibility boundary | Load-port model, OEM tool integration, firmware, board revision, connector set, and field replacement suitability must be verified from the installed system and physical board labels |
| Application domain | Semiconductor wafer load port, Fixload, SMIF, Express, and related Brooks interface-automation service-part contexts |
| Brooks load-port role | Brooks interface automation systems support semiconductor material handling, identification, environmental control, FOUP, SMIF, and load-port operations depending on platform |
| Load-port module role | Brooks load-port module literature describes load port modules as interchangeable interfaces for loading cassettes or pods into compatible semiconductor tools |
| Configured-unit rule | Revision, firmware, connector population, daughter boards, tool-specific wiring, and compatible load-port generation vary by the physical board and host equipment |
Part Photos
17 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $404.50 to $1,449.99. Based on 6 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation 002-6878-06 rev A3 300mm Wafer (Working)
- Brooks automation 002-6878-06 rev A3
- BROOKS Express Load Port Mother Board 002-6878-06 (As-Is)