Wafer Robotics
002-5870-05
Brooks Automation Wafer-Handling Robot Controller Module
About this part
Brooks Automation 002-5870-05 is a controller/control-module assembly for semiconductor wafer-handling automation. Exact-part records identify the module by this Brooks part number, and an observed system configuration pairs it with an AcuTran 7 atmospheric wafer-transfer robot. The configured suffix is significant; related 002-5870 assemblies are distinct parts and are not exact aliases or automatically interchangeable replacements
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part number | 002-5870-05 |
| Component type | Robot controller / control-module assembly |
| Equipment application | Semiconductor wafer-handling automation |
| Input supply | 24 V DC (cataloged for 002-5870-05; confirm against the installed unit's nameplate before connection) |
Observed System Relationships
These relationships document known configurations without treating associated components as exact aliases or guaranteed universal compatibility.
| Role | Identifier | Evidence boundary |
|---|---|---|
| Controller module | 002-5870-05 | Exact subject identifier |
| Atmospheric wafer-transfer robot | 002-7090-05 | Observed paired AcuTran 7 configuration |
| I/O assembly | 002-4674-09 | Observed associated assembly; separate part number |
| Family user manual | MN-002-6980-00 | Cataloged AquaTran 7/AcuTran 7 family manual; not an exact-part document |
Replacement and Commissioning
Match the complete 002-5870-05 suffix before replacement. Confirm the installed I/O assembly, personality/configuration hardware, firmware, robot and aligner configuration, cable set, connector pinout, and nameplate electrical requirements. Parts 002-5870-06 and 002-5870-07 are separately identified controller assemblies and should not be substituted solely because their base numbers match.
Part Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $3,999.00 to $3,999.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS 002-5870-05 ATM VTM WAFER HANDLING ROBOT CONTROLLER/ CONTROL MODULE