Sensors
002-3423-01
Brooks Automation VCE-6 Left-Hand SPS Emitter Assembly
About this part
Brooks Automation 002-3423-01 is the left-hand optical emitter assembly for the Substrate Present Sensor (SPS) used in a VCE-6 vacuum cassette elevator. It is installed with the rectangular SPS and viewport hardware and incorporates a laser PCB with adjustable optical-mount components. Within the VCE, the SPS detects wafer presence across cassette slots for cassette mapping and transfer control
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part number | 002-3423-01 |
| Manufacturer description | SPS Emitter Assembly, LH |
| SPS meaning | Substrate Present Sensor |
| Orientation | Left-hand (LH) |
| Equipment family | VCE-6 vacuum cassette elevator |
| Installation context | Rectangular SPS and viewport assembly |
| Sensor role | Optical emitter assembly used by the VCE substrate-present sensing system for wafer detection and cassette mapping |
| Optical electronics | Includes Brooks 001-9114-01 laser PCB assembly |
| Optical adjustment hardware | Horizontal and vertical angle supports, angle flexure, left-hand photo mount, and up/down angle-adjust block |
Principal assembly components
The left-hand emitter parts list identifies the principal optical and adjustment components below; routine fasteners and washers are omitted.
| Component part number | Description |
|---|---|
| 002-2661-03 | SPS horizontal angle support |
| 001-9234-02 | SPS vertical angle support |
| 001-9235-04 | SPS angle flexure |
| 001-9227-04 | Left-hand photo mount |
| 001-9236-02 | Up/down angle-adjust block |
| 001-9114-01 | Laser PCB assembly |
SPS alignment and service context
- The SPS must be aligned so wafers are detected correctly in every cassette slot.
- The applicable sensing position may be at the wafer transfer plane or above it, depending on the VCE configuration.
- Brooks specifies verifying SPS alignment through a cassette MAP operation and checking the resulting wafer count and slot locations.
- Changing the robot end effector can require realignment of both the VCE platform and the SPS.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $600.00 to $600.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks 002-3423-01 SPS Emitter Assembly, LH, 161665