Wafer Robotics

002-0921-11

Brooks Automation Wafer Chuck Robot

About this part

002-0921-11 is a Brooks Automation wafer-robotics service-part identifier observed in Sonisys auction records and external semiconductor surplus inventories as a wafer chuck robot associated with KLA-Tencor eS20XP equipment. Official Brooks material supports Brooks Automation semiconductor automation and wafer-handling context, but no verified official exact-part PDF, datasheet, manual, drawing, or compatibility sheet is currently available for 002-0921-11. Treat installed PCB, chuck condition, wafer size, robot generation, controller pairing, firmware, cabling, revision, and host-tool compatibility as physical-unit details that must be verified from the unit label and OEM documentation

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Photos (5)Listing history

Brooks Automation 002-0921-11 wafer chuck robot auction image

Archived part photo · View gallery

Key Facts

ManufacturerBrooks Automation

Part number002-0921-11

Product familyConfiguration-specific

Device typeWafer chuck robot service part

Configuration statusConfiguration varies

Application classWafer automation

CategoryWafer Robotics

Specifications

Identification

Part identifier	002-0921-11
Observed manufacturer	Brooks Automation
Observed exact-part description	Exact-part surplus evidence associates 002-0921-11 with Brooks Automation wafer chuck robot wording

Manufacturer context

Official company domain

Brooks material identifies Brooks as an automation provider serving semiconductor manufacturing and related automation markets

Application context

Observed host-system context

External exact-part surplus evidence reports removal from a KLA-Tencor eS20XP e-beam inspection system; KLA filings identify eS20XP as an e-beam defect inspection system

Configuration

Configured-unit rule	Installed PCB, chuck condition, wafer size, robot generation, controller pairing, firmware, cabling, revision, and host-tool compatibility can vary by physical unit and installed system
Verification boundary	Do not infer interchangeability with adjacent Brooks 002-series robots, wafer handlers, pre-aligners, controllers, KLA customer part numbers, or eS20XP assemblies without matching the full physical label, revision, configuration, and tool requirement

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$2,012.15Based on archived listing records

Recorded price range$2,012.15 - $2,012.15Low to high recorded listing price

Local documents0PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $2,012.15 to $2,012.15. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

Brooks Automation 002-0921-11 Wafer Chuck Robot KLA-Tencor eS20XP Surplus

Archived listings

Other Part Numbers & Aliases

002-0921-11Brooks 002-0921-11Brooks Automation 002-0921-11