Wafer Robotics
001-9116-01
Brooks Automation Wafer Slide-Out Detector Receiver Assembly
About this part
Brooks Automation 001-9116-01 is a wafer slide-out (WSO) optical receiver/detector assembly used in Brooks Vacuum Cassette Elevator sensing architecture. It receives the optical beam used to detect a wafer protruding from a cassette slot. VCE-generation compatibility is configuration-specific and must be matched to the equipment bill of materials
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part number | 001-9116-01 |
| Manufacturer | Brooks Automation |
| Component type | Wafer slide-out (WSO) optical receiver/detector PCB assembly |
| Function | Monitors an optical beam to detect a wafer protruding from a cassette slot |
| System role | Receiver/detector side of the wafer slide-out sensing arrangement |
| Equipment context | Brooks Vacuum Cassette Elevator load-lock sensing system; exact VCE generation requires equipment-BOM confirmation |
| Adjustment requirement | Optical alignment must be checked after installation, replacement, or other system changes |
Sensor Function and Service Context
What Does 001-9116-01 Mean?
001-9116-01 is a Brooks assembly part number rather than a published customer-configurable model code. Use the complete identifier when matching a replacement.
| Segment | Field | Interpretation |
|---|---|---|
| 001 | Brooks part-number prefix | Internal Brooks identifier prefix; it does not define a published equipment option. |
| 9116 | WSO assembly group | Identifies the wafer slide-out detector assembly group. Related -02 and -03 assemblies also use 001-9116, but they are separate parts. |
| 01 | Assembly variant | Distinguishes this assembly from the -02 and -03 variants. It is not the revision; revision markings are recorded separately. |
Compatibility and Installation Checks
001-9116-01 appears in both VCE-4 and VCE6 equipment records. Match the complete part number, receiver and laser arrangement, connector interface, and target elevator bill of materials before installation. Similar 001-9116-02 and 001-9116-03 assemblies are separate parts and should not be treated as interchangeable.
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $309.58 to $386.30. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 001-9116-01 / WAFER SLIDE OUT DETECTOR VCE6 / BROOKS AUTOMATION
- Brooks Automation Inc. P/N: 001-9116-01 Rev A / 19115-01 Rev D Wafer Slide