Sensors and Gauges

001-9114-01

Brooks Automation Sensor / Laser PCB Assembly

About this part

001-9114-01 is a Brooks Automation service-part identifier observed in Sonisys auction records and external exact-part listing evidence as a sensor assembly, mapping laser PCB, or laser PCB assembly in SPS emitter context. no verified official Brooks exact-part datasheet, manual, drawing, compatibility table, or PDF is currently available for 001-9114-01, so board revision, laser or sensor configuration, connector population, installed system, LAM or Brooks tool fit, and replacement compatibility must be verified from the physical label and OEM support records

Configurations vary. Verify the exact unit before choosing a replacement.

No archived photo available

Key Facts

ManufacturerBrooks Automation
Part number001-9114-01
Product familyConfiguration-specific
Device typeControl PCB
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategorySensors and Gauges

Specifications

Identification
Part identifier001-9114-01
Manufacturer contextBrooks Automation semiconductor automation and installed-base service-part context
Observed exact-part descriptionsExternal exact-part evidence identifies 001-9114-01 with sensor assembly, mapping laser PCB, and laser PCB assembly wording; these are observed descriptions, not official model-wide specifications
Applications
Application domainSemiconductor automation sensing, laser PCB, or mapping service context for Brooks Automation equipment
Observed context
SPS emitter contextAn external spare-parts list copy places 001-9114-01 as a laser PCB assembly under SPS emitter LH and RH parts-list sections; verify the installed equipment and service bill of materials before treating this as authoritative
Configuration
Configured-unit ruleBoard revision, optical or sensor configuration, connector population, harnessing, calibration, installed firmware or electronics, and host-tool compatibility vary by physical unit and installed system
Verification boundaryDo not infer interchangeability with nearby Brooks 001-91xx identifiers, SPS emitter assemblies, LAM sensor assemblies, wafer-slide sensors, or other laser/sensor PCBs without matching the full part label, revision, connector set, and OEM service requirement

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$290.00Based on archived listing records
Recorded price range$290.00 - $290.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $290.00 to $290.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • LAM Sensor Assy(Brooks Automation) 001-9114-01 (As-Is)

Archived listings

Other Part Numbers & Aliases

001-9114-01Brooks 001-9114-01Brooks Automation 001-9114-01