Load Ports
001-8200-76
Brooks Automation VCE Vacuum Cassette Elevator / Load-Lock Module
About this part
Brooks Automation 001-8200-76 designates a configured Vacuum Cassette Elevator assembly for semiconductor wafer-handling equipment. The VCE indexes a wafer cassette to the wafer transport plane and provides the load-lock interface between atmospheric cassette loading and a vacuum transport chamber. Exact-unit inventories place the -76 configuration in 150 mm ULVAC Enviro/Phoenix processing systems alongside a separate Brooks VacuTran 5 robot. Wafer capacity, supported cassette sizes, door arrangement, utilities and control interfaces remain configuration-dependent and should be verified from the unit nameplate and configuration documentation
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part identifier | 001-8200-76 |
| Product family | Vacuum Cassette Elevator (VCE) |
| Component type | Configured cassette-elevator and vacuum load-lock module |
| Process environment | Semiconductor vacuum wafer handling |
| Cassette handling | Indexes cassette slots to the wafer transport plane for horizontal wafer transfer |
| Vacuum interface | Provides an atmosphere-to-vacuum interface between cassette loading and a vacuum transport chamber |
Configuration and interchangeability
The terminal suffix identifies a configured VCE assembly and must be preserved when evaluating replacement compatibility.
- The documented 150 mm application is an installed-system observation, not a universal wafer-size rating for every 001-8200-76 unit.
- Specifications published for sibling 001-8200 configurations, including VCE2 unit 001-82-00-68, must not be assigned to the -76 configuration without matching configuration documentation.
- Specifications for the later VCE 6 generation describe the continuing VCE operating concept but do not establish the dimensions, utilities, door style or cassette capacity of 001-8200-76.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,501.25 to $1,501.25. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks 001-8200-76 Wafer Cassette Elevator Vacuum Load Port Load Lock Working