Brooks Automation VacuTran 5 MTR5 Transfer Robot Drive
About this part
001-7600-10 is a Brooks Automation VacuTran 5 / MTR5 wafer-handling robot identifier. Stored Sonisys auction titles and surplus/inventory evidence identify it as an MTR-5 robot, VacuTran 5 MTR5 transfer robot drive, or vacuum robot, with observed cross-reference wording for 799-550205-001 and related armset context. Exact wafer size, armset/end-effector configuration, controller compatibility, axis configuration, firmware, calibration, and tool fit must be verified from the physical unit and installed system documentation
Configurations vary. Verify the exact unit before choosing a replacement.
VacuTran 5 MTR5 vacuum transfer robot / robot drive assembly
Manufacturer family
Brooks Automation / PRI Automation wafer-handling vacuum robotics
Observed exact part number
001-7600-10
Observed secondary identifier
799-550205-001 appears in stored and listing wording with 001-7600-10 MTR-5 robot evidence
Robot family
Observed model wording
MTR-5, MTR5, VacuTran, VacuTran 5, transfer robot drive, and vacuum robot wording appears in exact or closely related available evidence
Function
Primary role
Vacuum wafer-handling robot / transfer robot drive assembly used for wafer movement inside vacuum automation systems
System context
Brooks vacuum robotics context
Brooks materials identify vacuum automation as a current solution area, while MTR5 service evidence groups MultiTran 5 / VacuTran 5 with Brooks vacuum robotics
Configuration
Armset relationship
Inventory evidence links 001-7600-10 with 001-5370-16 dual armset wording; the armset is treated as related configuration context, not as an exact alias for this part page
Configured-unit rule
Wafer size, armset, end effector, motor/drive configuration, controller compatibility, firmware, calibration, mounting, and tool-specific integration can vary by physical unit
Applications
Application domain
Semiconductor vacuum wafer transfer, cluster-tool automation, load-lock/process-chamber wafer handling, and Brooks/PRI vacuum robot service
Compatibility
Tool-fit caution
Do not assume compatibility from MTR5, VacuTran, or 799-550205-001 wording alone; match the full part number, armset/end effector, controller, calibration, and installed tool requirement
Documents
Documentation status
No official exact Brooks Automation PDF for 001-7600-10 is currently available in the Sonisys document archive
Part Photos
9 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$2,950.97Based on archived listing records
Recorded price range$2,950.97 - $2,950.97Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $2,950.97 to $2,950.97. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
