Brooks Automation VacuTran 5 VTR5 Transfer Robot Drive
About this part
001-7600-02 is a Brooks Automation VacuTran 5 / VTR5 wafer transfer robot drive identifier found in Sonisys auction history and multiple semiconductor-surplus records. stored and evidence consistently describes it as a wafer transfer robot, transfer robot drive, or VacuTran 5 / VTR5 drive, with some records tying individual units or removed subassemblies to Ulvac Enviro II systems, 001-5104-01 Rev C/C2 board context, 001-1951-06 drive context, 001-1957-02 radial sensor PCB context, and related robot teach-pendant or motor assemblies. No exact official Brooks datasheet, service manual, wiring guide, or compatibility matrix was found
Configurations vary. Verify the exact unit before choosing a replacement.
VacuTran 5 VTR5 transfer robot drive, wafer transfer robot, MTR5 VacuTran 5 transfer robot drive, and transfer robot drive
Robot family
Product-family context
VacuTran 5 / VTR5 vacuum wafer-transfer robot family; listing records also use MTR5 wording in the same marketplace context
Likely machine function
Wafer transfer and robot-drive function in semiconductor vacuum automation systems, based on repeated transfer-robot and wafer-transfer descriptions
Observed configuration
Ulvac Enviro II context
Stored auction and equipment-listing evidence identify 001-7600-02 as a Brooks Automation VacuTran 5 robot used with or removed from an Ulvac Enviro II RF strip / etch-ash system context
Board/revision context
Stored and records associate individual units with 001-5104-01 Rev C or Rev C2 board context; verify the actual installed board revision on the physical unit
Drive and internal part context
External surplus evidence associates one 001-7600-02 drive listing with 001-1951-06, Brooks 11951, 001-5104-01, and Dynamics Research PC 40010R3 markings
Related service parts observed
Stored and evidence mentions 001-1957-02 radial sensor PCB for 001-7600-02, 001-1984 robot teach pendant from 001-7600-02, 001-4450-01 Rev C24 Multi Tran card from 001-7600-02, and 720103680 / Magmotor IC-10368-0 assembly from 001-7600-02
Configuration
Configured-unit rule
Robot revision, armset, end effector, installed boards, sensor package, controller pairing, teach pendant, cable set, firmware/software, wafer size, and host-tool compatibility vary by physical unit and system
Compatibility
Tool-fit caution
Do not assume compatibility with Ulvac Enviro II, VCE systems, another VacuTran/VTR5/MTR5 robot, a Brooks controller, or a host process tool from the part number alone
Documentation
Documentation status
No exact official Brooks Automation datasheet, service manual, wiring guide, pinout, firmware guide, calibration procedure, or compatibility matrix for 001-7600-02 is currently available in the Sonisys document archive
Unsupported details avoided
No axis count, wafer-size rating, motor model, encoder type, connector pinout, I/O map, voltage input, teach-pendant compatibility, firmware version, or calibration method is claimed without exact documentation
Inspection
Buyer/research inspection priorities
Verify robot labels, serial number, board revisions, armset, end effector, motor and encoder condition, cables, vacuum-feedthrough interfaces, home/limit sensors, controller compatibility, firmware/configuration, and shipping damage before reuse
Condition
Stored condition context
Stored and listing evidence includes working, used, pre-owned,, untested, as-is, and removed-subassembly contexts
Part Photos
15 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records5Tracked historical listing records
Historical median price$3,157.84Based on archived listing records
Recorded price range$350.56 - $3,611.24Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $602.16 to $3,611.24. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks Automation 001-7600-02 Wafer Transfer Robot VacuTran 5 VTR5 Working
Brooks Automation 001-7600-02 VacuTran 5 VTR5 Transfer Robot Ulvac Enviro II
001-4450-01 REV C24 MULTI TRAN CARD 11951 REV C PART OF 001-7600-02 / BROOKS
720103680 / MAGMOTOR MOTOR IC-10368-0 ASSY FROM 001-7600-02 / BROOKS AUTOMATION
