Wafer Robotics
000-7100-3
Brooks Automation Orbitran Wafer-Transfer Robot
About this part
Brooks Automation 000-7100-3 is an identifier for an Orbitran wafer-transfer robot used in semiconductor equipment. The exact suffix establishes the Orbitran identity but does not establish electrical ratings, wafer size, motion envelope, end-effector arrangement, controller compatibility, or vacuum-versus-atmospheric configuration; those details must be verified from the unit label or configuration-specific documentation
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part number | 000-7100-3 |
| Product line | Orbitran |
| Equipment class | Semiconductor wafer-transfer robot |
Legacy service and configuration notes
Orbitran robots remain represented in specialist semiconductor-robot service channels, but service and replacement selection must be based on the installed configuration.
- US Digital Designs identifies itself as the authorized agent for Brooks Automation Orbitran and ZBot robots.
- Orbitran/ZBot family service coverage includes Z-axis and theta drives, extend/retract mechanisms, E/R cabling, wafer-detection and vacuum electronics, through-body wiring, and reduction gearing.
- Confirm the installed controller, end effector, wafer format, operating environment, travel, and tool interface before specifying a replacement or repair configuration.
Part Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $2,499.99 to $2,499.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 000-7100-3 / ROBOT ORBITRAN / BROOKS AUTOMATION. REBUILT UNIT